CG1

JIS symbol Double acting Minimum Strokes for Auto Switch Mounting Stroke Long stroke (2) (mm) Max stroke (mm) Number of switches Bore size (mm) Standard stroke (1) (mm) Auto switch model 2 1 D-C7/C8 D-B5/B6 D-H7 D-G5/K5 25, 50, 75, 100, 125, 150, 200 201 to 350 20 15mm 10mm 301 to 400 25 301 to 450 32 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 15mm 1500 301 to 800 40 D-B59W 301 to 1200

Rotary Actuator/Vane Type

Size: 20, 30, 40 Shaft-end shape of size 40 CRB2 CRB2 Y1 X 1.5 2 K CRB1 2 x Q2 Y1 X Plate 4 0 0.030 MSU Chamfer (Rotation range is stated on page 70.) Chamfer (Rotation range is stated on page 70.)

HRX-OM-W060

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

HRX-OM-Z002

In particular, if the voltage rise rate (dv/dt) at zero crossing exceeds 40 V/200 sec, it may cause a malfunction.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 173 162.5 145 14 L n 4 185.5 175 155.5 15 2 148 137.5 124 12 3 160.5 150 134.5 13 5 185.5 175 155.5 15 6 198 187.5 166 16 7 210.5 200 176.5 17 8 210.5 200 187 12 9 223 212.5 197.5 13 2 160.5 150 134.5 13 3 173 162.5 145 14 5 198 187.5 166 16 6 210.5 200

Electric Actuator Miniature Rod Type Miniature Slide table Type

%] Duty ratio (%) Pushing time (minute) 70 or less 100 LEPY10 LEPS10 Compact 80 70 10 100 50 5 7.4 Precaution on maintenance Caution 1.

Vacuum Unit

Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) ZK212 Exhaust Characteristics Flow Rate Characteristics 100 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 90 90 60 80 80 40 Vacuum pressure 70 70 Port exhaust 20 Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Silencer exhaust/Complex

4-channel Flow Monitor ( compatible)

Outline of IO-Link function 70 Communication specifications 70 Process data 71 IO-Link parameter setting 75 Maintenance 89 Forgotten the security code 89 Troubleshooting 90 Specifications 101 Dimensions 104 -1No.PF-OMA1011-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Do not use it in a line that is kept pressurized because it could cause the body to break. 1106 Air Suction Filter Series ZFA Dimensions: ZFA 100 200 Single unit Bracket ZA ZX ZR Cover opened-up dimensions 70 Element extracted dimensions 55 ZM ZMA ZQ 2 x 4.5 ZH ZU 2 x Port size ZL Note) The above diagram is for ZFA200. The bracket location shows L side.

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS1H63 200 200 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 0 0 10 20 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10

HRX-OM-W058

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Peltier-type Chiller Thermo-con/ Compact Type

Heating Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 800 800 700 700 Heating capacity [W] Heating capacity [W] 600 600 Ambient temperature 35C Ambient temperature 35C 500 500 400 400 300 300 Ambient temperature 25C Ambient temperature 25C 200 200 100 100 0 0 10 20 30 40 50 60 70 Circulating fluid

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Title not found

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9

Title not found

60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9