240

80 80 Me m 50 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40 40 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2

Electric Actuators

160 160 160 L4 120 120 120 120 80 80 80 80 40 40 40 40 0 0 0 0 0.0 0.88 1.76 2.64 3.53 4.4 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0 0.44 0.88 0.32 1.76 2.2 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 Overhang: L5 [mm] Overhang: L5 [mm] 160 160 120 120 80 80 40 40 0 0 0 0.22 0.44 0.66 0.88 1.1 0 0.66 1.32 1.98 2.65 3.3 L5 Work load [lb] Work load [lb]

Industrial Filters

120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 750 20 90 32 330 216.3 230 490 1160 1485 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 1000 20 105 41 330 216.3 230 490 1415 1750 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400 267.4 230

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

IDG

IDG60S (Type B products group) IDG75S (Type B products group) 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) 10 10 P1 = 0.3 MPa P1 = 0.3 MPa 20 20 30 30 P1 = 0.5 MPa P1 = 0.5 MPa 40 40 50 50 P1 = 0.7 MPa P1 = 0.7 MPa 60 60 70 70 80 40 80 120 160 20 80 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

LG1H

Refer to pages starting with 181 for mounting. 80 180 280 60 160 260 Dimensions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Application Examples Robot handling Palletizing Automobile Case packer 254 Vacuum Pad with Ejector ZHP Series 63, 80 RoHS ZK2 How to Order ZQ ZHP 80 BM N B 00 Without ejector ZR ZB ZHP 80 BM N B 10 C6 S With ejector ZA Pad diameter Exhaust release ZX 63 63 80 80 S Silencer exhaust ZM Supply (P) port Pad form Symbol Type Port size C4 Metric 4 One-touch fitting C6 6 One-touch fitting N3 Inch

AS

(UL standard V-0) 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Hydraulic Filters

/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40 (1 1/2B) 40 (1 1/2B) 1 1/2 1 1/2 160 160 50 (2B) 50 (2B) 260 260 65 (2 1/2B) 450 80 (3B) 600 Note) Tapered female thread connection conforming to JIS B 0203 is compatible.

Compact Cylinder

Compact Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS New New Both ends tapped mounting added. Bore sizes 80, 100 added. Port thread types NPT, G added.

Series AP500

psig (0.55 MPa) 20 psig (0.14 MPa) AP1500 50 0.34 0.69 100 0.62 90 40 0.28 0.55 80 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes

Digital Flow Switch (Integrated display type)

I max. 92% 8% 90% 10% PFM710 80% 20% 0.2 to 7.0 L/min 0.2 to 7.4 L/min 0 to 7.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.5 to 25.0 L/min 0.5 to 26.3 L/min 0 to 26.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.5 to 20.0 L/min 0.5 to 21.0 L/min 0 to 21.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.0 to 50.0 L/min 1.0 to 52.5 L/min 0 to 52.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20%

REA/REB

P-80 (JT) This catalot is printed on recycled paper with concern for the global environment.

Series MLGP

Auto switch proper mounting position (detection at stroke end) and its mounting height 20 to 100 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-Z7 Auto switch D-Z80 D-Y59 D-Y69 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA D-Y7BA D-P3DW *Cannot be mounted on bore size 20. 25 to 63 80 , 100 D-P4DW *Cannot be mounted on bore size 25 or less.) 32 to 63 80 to 100 Less than 25 to 75 strokes * For bore sizes

Process Valve Series VNA

5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 3.8 2.6 1.3 0.3 0.1 3.8 2.6 1.3 0.3 0.1 80 80 1.9 1.3 0.7 0.2 0.4 1.9 1.3 0.7 0.2

Series AK1000

0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

MRQ

Reed switch: D-A7/A8, Series MRQ Linear motion part size Solid state switch: D-F7/J7 Output of rotating part (at 0.5MPa) Linear motion stroke (mm) Rotation angle 5 10 15 20 25 30 40 50 75 100 80 to 100 170 to 190 32 1.02N/m An air cushion is also available. 80 to 100 170 to 190 40 1.91N/m Application examples A connecting port can be selected from two positions that are available on the rotation

Shock Absorbers and Rate Controls

PM Series Sizing Curves Metric I 40 80 120 160 200 50 75 100 125 150 175 TOTAL ENERGY (Nmrb) TOTAL ENEFGY (Nm/c) 80 120 160 200 244 200 400 TOTAL ENEFIGY (Nm/c) rOTAL ENERGY (Nm/c) i 2 d ; 1 f 200 400 TOTAL ENEFGY INm/c) 00.2 0.4 0.6 0.8 1.0 1.2 TorAL ENERGY (to3Nm) 0.4 0.a 1 2 1 6 2 TOTAL ENEFcY (103Nm) TorAL ENEBGY (1o3Nm) Pil models is O.1 Minimum impact velocity for I LhCIck AbsCIrbers

Electromagnetic Digital Flow Switch

Temperature characteristics 0.5% F.S. (25C reference) Accumulated flow range*1 9.9 L 9 L by 0.1 L by 1 L Switch output NPN or PNP open collector output Maximum load current 80 mA Maximum applied voltage 28 VDC Internal voltage drop NPN: 1 V or less (at load current of 80 mA) PNP: 1.5 V or less (at load current of 80 mA) Response time*2 0.5 s/1 s/2 s/5 s Output protection Short-circuit protection