Vacuum

sggT 3 Lr 33 51 75 96 117 138 159 180 La ,15 6 al 1(F 12S r50 171 IQ 44 suction filter and silencer valve retease vatve vacuum switch (solid-state or diaphragm) Pnessune to-21iFllg (-030 mmllD. nozzle diameters for efficient aoolication. floul Incnemed by 40%. ) nozzle suction flow is 40% higher than nal designs. &Lig[tweignt. 15.5mm) width; 0.881bs. (4009f) weight.

Vacuum

sggT 3 Lr 33 51 75 96 117 138 159 180 La ,15 6 al 1(F 12S r50 171 IQ 44 suction filter and silencer valve retease vatve vacuum switch (solid-state or diaphragm) Pnessune to-21iFllg (-030 mmllD. nozzle diameters for efficient aoolication. floul Incnemed by 40%. ) nozzle suction flow is 40% higher than nal designs. &Lig[tweignt. 15.5mm) width; 0.881bs. (4009f) weight.

LJ1H

Mer LEC-MR-RB-032 0 20 40 60 m Transfer load m (kg) Not required. 2000 Half load a=1000 L3 Regeneration option model Driver type 1000 a=2000 m A1 A2 B1 B2 Not required. Not required. Not required.

VZ100/300/500

SY Type 40/41 (Bottom ported) How to Order Applicable solenoid valve VZ514VZ514MVZ524VZ524MApplicable blanking plate assembly DXT201-15-4A VV3Z5 40 05 2 01 SYJ R port R port P/R port thread type Manifold VK Stations 40 41 Type 40 Type 41 P port 02 2 stations Nil Rc VZ 01 1/8 A port side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

AC Servo Motor Driver

Regenerative power [W] Built-in regenerative Driver LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSB-S5 30 LECSB-S7 10 30 100 LECSB-S8 10 30 100 Note 1. Always install a cooling fan. 2.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

In the case of MVGQM50-40 st, an interface of 10 mm wide is installed inside of the MVGQ50-50 st, and thus the full length dimension of the body is the same as 50 st. 20, 30, 40, 50, 75, 100 125, 150, 175, 200 25 M L MVGQ 25, 50, 75, 100, 125, 150, 175, 200 M L 32, 40 MVGQ 50, 63 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

VZ3000

-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 Series VZ3000/Base Mounted Manifold Specifications Manifold Standard Manifold Specifications Type 40 Type 41 Type 42 Type 43 Model Manifold

Compact

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Compact End Lock Cylinder Series CBQ2

size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92 75 81.5 64.5 5.5 8 54 62 72 40 4FD FX FZ FT L B + Stroke A + Stroke 93.5 75.5 83.5 65.5 6.6 9 67 76 89 50 95 77 89 71 9 9 80 92 108 63 Rod end male threads Bore size (mm) L L1 M 32 17 38.5 34 40 17 38.5 40 50 18 43.5 50 63 Rod end nut L1 18 43.5 60 Rear flange type/CBQ2G, CDBQ2G (mm) Rear flange type With rear lock

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

CNG

P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 223 201 40 35 17 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 247 (256) 227 (236) 50 35 17 70 6 14 M14 x 1.5 44

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

1.63

mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20