SZ3000

With common lead wire for double solenoid, 3 position type, 4 position type SX100-40-4D With common lead wire for double solenoid, 3 position type, 4 position type SX100-41-4D Exhaust Restriction Caution (Lead wire length 300 mm) (Lead wire length 300 mm) Since Series SZ is a type in which the pilot valve exhaust joins the main valve exhaust inside the valve, care must be taken that the piping

Electric Actuator Triple Axis P&P Unit

1000 32.5 1100 34.6 1200 36.7 1300 38.8 1400 40.9 Weight of body for side mount without motor 650 Stroke(mm) X axis 100 17.1 150 200 19.2 250 300 21.3 350 400 23.4 450 500 25.5 550 600 27.6 1500 46.5 Stroke(mm) X axis 700 29.7 750 800 31.8 850 900 33.9 950 1000 36.0 1100 38.1 1200 40.2 1300 42.3 1400 44.4 3 Triple Axis P&P Unit How to Order Single Axis LG 240Z 50 Y G J Y axis

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQP2 Double acting 7-6-88 Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 Spring extend CQP2 7-6-98 Large Bore Size 125, 140 160, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

100 200 300 500 700 Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

Slit Valve

CAUTION 184 49 49 Cassette type Half MESK/XGT223 340 A 50 305 44 36 112 50 B 365 !

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Unrestricted 300/50 m/s2 Lubrication Mounting orientation Impact/Vibration resistance Enclosure(2) Dustproof Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 V 6, 12, 24, 48 V 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz 3.5 VA/50 Hz, 3.3 VA/60 Hz 3 VA/50 Hz, 2.8 VA/60 Hz 4 W (Standard), 2 W (Low power consumption type) 4.3 W (Standard), 2.3 W (Low power consumption

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

VM

to 1.0 MPa (1) VA 5 to 60C (No freezing) Ambient and fluid temperature Effective area High cycle rate, long life/300 c.p.m. or less Piping possible to any EXH port.

Compact Guide Cylinder End Lock Type SeriesMGP

72 124 200 300 84 122 172 46 48 40 14 9 Rc1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 48 50 14 9 Rc1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/A, DB, E dimensions (mm) (mm) DB E A Bore size (mm) Bore size (mm) X XA XB XC XL YY YL Z Over 25 to 175st 17.5 Over 25 to 175st 102 25st or less Over 175st 25st or less Over 175st

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Cylinder with Lock Series MNB

51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

ITV

kPa 300 0.5 ITV 200 kPa 200 100 kPa 100 50 kPa IC 0.4 0.6 0.8 1.0 1 0 1 2 3 4 5 6 0 7 1.2 Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV009 VY1 With 50% of signal input Linearity, Hyteresis Repeatability 1 1 G Output deviation factor (% F.S.)

Non-contact Gripper

ZP3E 300 g 300 x 9.8/1000 = 2.94 N N = (9.8 x W/1000)/(F) = (9.8 x 9700/1000)/(11.2) = 9 Rounding up to the nearest higher integer ZP2 For a workpiece mass of 300 g (2.94 N) XT661-6A: Temporary lifting force 2.95 N Workpiece mass 300 g (2.94 N) XT661-8A: Temporary lifting force 3.75 N Workpiece mass 300 g (2.94 N) XT661-10A: Temporary lifting force 7.2 N Workpiece mass 300 g (2.94 N)

Air Cylinder NCQ7 Series Compact Cylinder

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

70pvpump

5 to 55 5 to 50 VC Outlet air atmospheric pressure dew point (C) 20 VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore