TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

SY

(Connector, socket x 2pcs. only) 2 200VAC 50/60Hz Lead wire length Note 2) "R" and U" specifications are only available for DC. 110VAC 50/60Hz [115VAC 50/60Hz] 3 300mm Nil Electrical entry 4 220VAC 50/60Hz [230VAC 50/60Hz] 6 600mm G Grommet (lead wire length: 300mm) H Grommet (lead wire length: 600mm) 1000mm 10 15 20 25 30 50 1500mm 2000mm 2500mm 3000mm 5000mm L With lead wire L type plug

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

D side VQC SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly SQ 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Compact Guide Cylinder

50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 Load mass m [kg] Load mass m [kg] 25 25 20 20 16 16 12 1 1 12 0.1 0.1 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 100 100 10 10 50 50 Load mass m [kg] Load mass m [kg] 40 40 32 32 25 25 1 1 20 20 16 16 12 12 0.1 10 100 0.1 10 100 Eccentric

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

2/3 Port Valve

Oil (D, N) Vacuum (V, R, Y) 50 20 11 60 17 7 50 40 18 60 35 12 50 50 21 60 45 17 AC VX21 60 40 80 AC DC AC DC 60 60 40 100 60 40 Max. DC (1) (2) AC 20 10 Min. 10 5 VX22 Option Material DC No. Description Note 1) Dew point: 10C or less. Note 2) 50cSt or less Note 3) "D", "N", "V", etc. in the parenthesis are option symbols.

Refrigerated Air Dryers

-10, IDF15E1-10 IDU6E-10, IDU11E-10, IDU15E1-10 1 kVA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) Singlephase Refrigerant R407C (HFC) IDU E 2000 IDF22E-20, IDF37E-20 2 kVA 3 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 4 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 9 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 200 VAC (50 Hz) 200, 220 VAC (60 Hz) Singlephase 10 380, 400, 415 VAC (50 Hz) 380 to

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

MXQ

Standard Stroke Model Standard stroke (mm) 10, 20, 30, 40, 50 MXQ6 10, 20, 30, 40, 50, 75 MXQ8 10, 20, 30, 40, 50, 75, 100 MXQ12 10, 20, 30, 40, 50, 75, 100, 125 MXQ16 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ20 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ25 8-5-9 10 Series MXQ Theoretical Output IN OUT The dual rod ensures an output twice that of existing cylinders.

C95

10 12 12 16 16 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 214 240 264 293 346 381 212 238 259 288 341 371 32 36 45 50 63 71 7 10 10 10 12 14.5 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 200 222 244 273 321 356

MLGP

50 50 Load weight m (kg) Load weight m (kg) 40 40 50 50 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10

MLGP

1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6

ZP

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

CQS

16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50

CQS

12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40