VQ7-6/7-8

108.5(121.5) 108.5(121.5) 50(63) 5 3 38(53) 50(63) 32(42) 5 3 1 23(30) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7

REC

13 8 18 15.5 34 26 13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Industrial Filters

20 (3/4B) 500 3 210 640 741 764 30 25 (1B) 210 645 750 772 30 40 A Elements Sintered Metal/Fiber Nonstandard elements of the FQ1 series can also be used commonly.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

3

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Fluid Proof pressure Air 1.5 MPa Note 4) 0.1 to 0.6 MPa Operating pressure

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 30 4.

New

Add 10 g for conduit, 30 g for DIN terminal, and 60 g for conduit terminal type respectively. Refer to Glossary of Terms on page 30 for details on the max. operating pressure differential.

CNG

M10 x 1.25 29 1/8 26.5 2.5 73 5.5 7 60 30 75 3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12 M5 x 0.8 241 (250) 47 169 (178) 50 221 (230) 35 25 70 6 14 M14 x 1.5 44 1/8 28 2.5 81 6.6 8 66 36 82 4 12 M6 x 1 Note) Dimensions inside ( ) are for long strokes. 8 Series CNG Dimensions Rear flange type (G): With rubber bumper/

Compact Cylinder with Air Cushion and Lock Series RLQ

Cylinder model C D Mounting bolt size RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 M5 x 90 L Mounting bolt CLJ2 95 M5 x 95 L 100 M5 x 100 L CLM2 110 M5 x 110 L 8 C Flat washer D 120 M5 x 120

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199

Water-cooledThermo-chiller

75 60 60 Outlet pressure [50 Hz] 45 45 30 30 Return port pressure Return port pressure 15 15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

Compressed Air Cleaning Filter Series

pressure switch (with indicator) (30 VDC) Refer to How to Order of respective models.

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

NAAMS Standards Compliant

30 45 45 60 60 75 75 90 90 105 105 120 120 135 135 Clamp arm position L (Left side mounting) R (Right side mounting) R L D Right Left Both sides Switch cassette Switch cassette * Proximity switch mounting surface viewed from the front.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125