MLU

Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

RZQ

For detailed specifications, refer to page 10-20-1. Electrical entry Type Part No.

Refrigerated Air dryer Series IDU/IDF

C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7

MONOSASHI-KUN

The cylinder section does not have a water resistant enclosure. 3-3 Allowable Kinetic Energy 3-3-1 Allowable Kinetic Energy (J) Bore size(mm) 12 20 32 40 50 63 Allowable Kinetic EnergyE 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 Mass of Cylinder Movable Parts (g) Cylinder stroke (mm) Bore size(mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168

Stainless Steel 316

M Weight (g) A D L D Applicable tubing (inch) 10 2.5 22 8.6 4 KQGS03-32 10-32UNF 25 18 5/32 M 2.78 12 20.9 11 4.1 KQGS03-N01S NPT1/8 A A L 2.5 22.8 13 4 KQGS07-32 10-32UNF 13 25.8 21.7 13 18.8 9.9 KQGS07-N01S 1/4 NPT1/8 4.76 Connection thread 20 20 10 KQGS07-N02S NPT1/4 H 5.56 14 30.5 26.4 17 17.2 KQGS09-N01S NPT1/8 (In case of R) 28.5 22.7 18 20.9 KQGS09-N02S 5/16 NPT1/4 D 23.3 Applicable

Series LX Acceleration Time Guide

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

ISG

26 23 20 26 30 29 10 30 29 10 ISA2 77 77 99 99 IS 126 126 R 3/8 R 3/8 ZSM PF2 IF Dripproof type ISG210 to 291-030 (Without hysteresis scale plate) ISG210 to 231-031 (With hysteresis scale plate) Data Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure adjusting bolt Setting pressure adjusting bolt 75 18 8.5 110 56 175 110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20 26

Refrigerated Air Dryer

Applicable dryer Weight lb [g] A B A 0.8 [20] 0.8 [20] AME 8.7 [220] 9.4 [240] 0.08 [35] IDF-FL209 IDFB3E AMF IDFB4E 14.8 [375] 7.7 [195] 0.12 [55] IDF-FL203 B IDFB6E ZFC 13.3 [340] 0.15 [70] IDF-FL204 IDFB8E 10.4 [265] SF 14.8 [375] 0.17 [75] IDF-FL205 IDFB11E 0.4 [10] SFD [17.3] 440 [14.5] 370 [0.26] 120 IDF-FL206 IDFB15E LLB (IDF-FL209) (IDF-FL203 to 208, 213, 214) IDFB22E 21.7 [550] 14.4

A

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Soft Start-up Valve AV2000/3000/4000/5000 1

AV 00 1 G 20 02 F C AV AU Manual override AF Nil: Non-locking push type (Flush) B: Locking type (Tool required) C: Locking type (Lever) Soft start-up valve AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size IR 20 30 40 50 1/4 3/8 1/2 3/4, 1 VEX AMR Light

Soft Start-up Valve AV2000/3000/4000/5000

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

EX500

TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 TYPE1 MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 1 2 3 4 5 6 7 8 Stations Rail length L1 110.5 123 148 173 185.5 210.5 223 248 Mounting pitch L2 100 112.5 137.5 162.5 175 200 212.5 237.5 Manifold length L3 L4 82 102 122 142 162 182 202 222 12 12 12.5 12.5 13 13

Electric Actuators

load speed Motor type Brake Guide type Lead screw Series Capacity repeatability seal room kg mm/s mm 50W 5 0.1 300 Horizontal mount specification Series LJ1 Slider guide 100W Slide screw 0.1 300 50W 0.1 500 1 0 50W Ground ball screw 0.02 High rigidity direct acting 600 50W Rolled ball screw 0.05 guide Standard motor 100W 1 5 0.1 500 [Tamagawa Slide screw Seiki Co., Ltd.] 200W 20

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

CJ2Q

(mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Single Axis Electric Actuator Series LJ1 (AC Servomotor) Maximum speed mm/s Work load kg Positioning repeatability mm Clean room Dust seal Series Guide type Lead screw Brake 5 300 0.1 Horizontal mount specification Slider guide Series LJ1 300 Slide screw 0.1 500 0.1 1 0 Ground ball screw 0.02 High rigidity direct acting guide 600 Rolled ball screw 0.05 1 5 0.1 500 Slide screw 20

CJ2X

Example Rail mounting style CDJ2XB10-45-A Band mounting style CDJ2XB16-60-B Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Single Axis Electric Actuator Series LJ1

Single Axis Electric Actuator Series LJ1 (AC Servomotor) Maximum Work Positioning Clean Dust speed Series Guide type load Lead screw Brake repeatability room seal mm/s kg mm 5 300 0.1 Horizontal mount specification Slider guide Series LJ1 300 Slide screw 0.1 500 0.1 1 0 Ground ball screw 0.02 High rigidity direct acting 600 Rolled ball screw 0.05 guide 1 5 0.1 500 Slide screw 20