JXCx-OMT0034CN

ID Bit[70] 3 RWrn 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWrn+1 1) Bit[F8] 0 Bit[70] H RWrn+2 1) 2 065500 mm/s Bit[F8] L Bit[70] H RWrn+3 1) 2 0300 % Bit[F8] L Bit[70] 3 RWrn+4 1) Bit[F8] 2 ID1 4 2147483647 0.01mm Bit[70] 1 RWrn+5 1) Bit[F8] 0 Bit[70] 0 0255 RWrn+6 1) Bit[F8] 1 0255 4 Bit[70] 2 0255 RWrn+7 1) Bit[F8] 3 0255 RWrn+8 IF (ID=1) ID2 RWrn+917 ID1 ID3 RWrn+1826

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

MG

to 100 MGPL32 to 100 i !

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Acetic acid 100% Acetone Note 1, 2) 40% Ammonium fluoride 30% Ammonium hydroxide 100% Butyl acetate 100% Methylne chloride 38% Hydrochloric acid 50% Hydrofluoric acid 60% Hydrogen peroxide 100% Methanol Methyl ethyl ketone Note 2) 70% Nitric acid Note 2) 86% Phosphoric acid 85% Caustic potash 100% Sulfuric acid Note 2) Toluene Note 1, 2) Xylene Note 2) 100% Sodium hydroxide Note 2) 100%

2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

LEC-OM069xx

Q Value 50 to 1000 0.01 70 Immediately Tuning 5.9.3 Pn40E 2 2nd Notch Filter Depth 0 to 1000 0.001 0 Immediately Tuning 2 2nd Step 2nd Torque Reference Filter Frequency Pn40F 100 to 5000 1 Hz 5000 Immediately Tuning 2 2nd Step 2nd Torque Reference Filter Q Value Pn410 50 to 100 0.01 50 Immediately Tuning 2 1st Step 2nd Torque Reference Filter Time Constant Pn412 0 to 65535 0.01 ms 100 Immediately

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

220 230 AH 4 x AB AT E1 TR AO SA + Stroke AO Rod flange (F) 4 x FB [mm] Bore size [mm] R TF FB E2 UF W MF 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 R E2 W MF UF TF Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205 ZF + Stroke MF Single

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(mm) W l Z TR TT TX TY TZ V H Z ZZ e f h ZZ 40 R0.5 16 70 60 95 7.5 8 66 58 182 55 25 92 84 208 50 R0.5 16 83 73 108 10 9 73 65 201 60 28 99 91 227 1/4 stroke 63 R0.5 16 90 80 115 12 10 80 72 212 65 30 106 98 238 80 R2.5 30 112 100 162 16 13 90 75 230 80 32 116 101 256 100 R2.5 34 140 118 204 20 16 100 83 250 100 35 123 106 273 1/5 stroke 125 R2.5 34 170 140 234 20 16 100 83 252 100 35 123

Table of Contents

10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) Width across flats 60 4 x M5 x 0.8 70 10 Hexagon width across flats 24 A B 8 A B 40 40 C M12 x 1.75 100 ZPT100H-B16 103 M16 x 1.5 Model A 100 ZPT100H-B12 B 103 B 103 125 ZPT125H-A16 128 Model A 100 ZPT100H-A16 125 ZPT125H-B12 128 M12 x 1.75 125 ZPT125H-B16

Compact Cylinder with Lock Series CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D

CV/MVGQ

2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 110

3

80 100 Fluid temperature [oC] Fluid temperature [oC] PF3W711/511 PF3W721/521 1.2 1.6 Operating pressure/ Proof pressure [MPa] 1.4 1.0 Proof pressure [MPa] 1.2 Pressure [MPa] Pressure [MPa] 0.8 1 0.6 0.8 Operating pressure [MPa] 0.6 0.4 0.4 0.2 0.2 3-Color Display Digital Flow Monitor for Water 0 0 0 90 100 80 70 60 50 40 30 20 10 0 90 100 80 70 60 50 40 30 20 10 Fluid temperature [oC] Fluid

Rotary Actuator/Vane Style Series CRB1

(71) 110 95 22 48 4 100 17 29 14 38 62 (63) 124 (139 ) 36 1/8 140 (155 ) 70 (71) 140 125 22 48 4 100 23.5 29 14 38 62 (63) 124 (139 ) 42.5 1/8 128 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing Shaft shape pattern is dealt with simple made-to-order system (Refer to front matter 33).