VK3000

Unrestricted 300/50 m/s2 VZ Fluid Ambient and fluid temperature Response time (at the pressure of 0.5 MPa)(1) VF Manual override Lubrication Mounting orientation Impact/Vibration resistance(2) VFR VP4 Enclosure Note 1) Based on dynamic performance test, JIS B 8375-1981.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

Parallel Style Air Gripper Series MHZ

MHZ2-25D/MHZL2-25D MHZ2-6D/MHZA2-6D 14 160 Pressure 0.7 MPa 12 140 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) 10 120 Pressure 0.7 MPa 0.5 MPa F 100 8 0.6 MPa 0.5 MPa 0.4 MPa 80 6 0.3 MPa 0.4 MPa 60 0.2 MPa 0.3 MPa 4 40 0.2 MPa 2 20 F 0 10 20 30 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) Internal Grip MHZ2-10D/MHZL2-10D MHZ2-32D MHZA2, MHZ2, MHZL2 300

LEC-OM02904

A4 (2) LECSS150%55 (3) (SCCRShort Circuit Current Rating) UL100kA(500V) (4) [mm] LE-2502506 S5S6S7 25025012 S8 (5) 1530KW20 [min] LECSS2-S5 LECSS2-S7 1 LECSs2-S8 LECSS1-S5 LECSS1-S7 2 12 (6) 70% 04575 LECSS-(115% (full load current)) 1000 1000 100 100 10 10 [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 [] [] LECSS-S5 LECSS-S7LECSS2-S8 13 (7) UL/cULUL60/75 60[AWG

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

180

25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure

CLA

S start and next stop, accuracy speCified (depending lIpon Ihe cases, but 300 rom will be the standard) sometimes will nOI come true, please take into consideration. 11 ConSlr1lclion/Pa~ts list e ~-Long stroke design Parts List Notes : I No. Description Notes Material Material No.

5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

connector, refer to page 8-30-52. 8-29-1 2 Series CXS Specifications 15 6 10 20 25 32 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Bearing type Air (Non-lube) 1.05 MPa 0.7 MPa 0.1 MPa 0.05 MPa 0.15 MPa 10 to 60C (No freezing) 30 to 600 mm/s 30 to 700 mm/s 30 to 300

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

NVKF

N217 3 Way Direct Acting NVKF 300 series Rubber Seal Solenoid Valve Compact Size I Large Flow Capacity Low Power Option Available Vacuum Option Available Base Mounted or Body Ported Cv 0.25 Sries ]tlUlff 300 3-Porl / 0irscl Wmhil $hruid hlYe I Large Flow Capacity Cv 0.25 I Compact Size width 0.73" x length 2.67" I Low Power Consumption 4WDC (Standard model) 2WDC (Low wattage model) I Vacuum

3

Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300

3 Way Direct Acting NVKF 300 Series

@slrc' 3 Way Direct Acting NVKF 300 seies Rubber Seal Solenoid Valve Compact Size / Large Flow Capacity Cv 0.25 Low Power Option Available Vacuum Option Available Base Mounted or Body Ported Sries ]tlUlff 300 3-Porl / 0irscl Wmhil $hruid hlYe I Large Flow Capacity Cv 0.25 I Compact Size width 0.73" x length 2.67" I Low Power Consumption 4WDC (Standard model) 2WDC (Low wattage model) I Vacuum

Table of Contents

Series CQ2 Compact Cylinder: Large Bore Size Type Double Acting, Single Rod 125, 140, 160, 180, 200. How to Order . Precautions. Specifications. Construction. Dimensions . Series CQ2W Compact Cylinder: Large Bore Size Type Double Acting, Double Rod 125, 140, 160, 180, 200 . How to Order . Precautions. Specifications. Construction. Dimensions .

PSE550/300

Response time settings: 20 ms, 160 ms, 640 ms, 1280 ms This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

Compact Cylinder

1.0 MPa 0.05 MPa (20 to 63), 0.03 MPa (80, 100) Type Action Fluid Proof pressure Maximum operating pressure Minimum operating pressure Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Rubber bumper on both end Ambient and fluid temperature Cushion +1.0 0 mm Stroke length tolerance Note) Caution Through-hole/Both ends tapped common 50 to 500 mm/s 50 to 300

AMD

520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57