AC

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

Flow Control Equipment

4 / 3 8 / 1 2 / 3 4 / 1 4 1 / 1 2 Model AS1200 AS1400 AS2200 AS3200 AS4200 M3/M5 M3 2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 4.1-19 / 1 8, / 1 4 / 3 8 / 1 2 In-line M3/M5 / 1 8, / 1 4 / 1 4, / 3 8 2.5 to 25 20 to 40 32 to 63 32 to 63 40 to 100 40 to 100 AS1000 AS2000 AS3000 AS3500 AS4000 AS5000 4.1-23 / 1 4, / 3 8 / 1 4, / 3 8, / 1 2 / 1 4, / 3 8, / 1 2 63 to 125 1 40 to 200 160 to 250

IS3000

Light Assembly For 110 VAC: 1530118-1 220 VAC: 1530118-2 24 VDC: 1530118-5 Able to convert into L1, L2, L5 by changing each light assembly.

Free Mount Cylinder Series CU

Theoretical Output (N) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.7 0.5 0.3 19.8 14.2 8.49 28.3 OUT 6 3 14.8 10.6 6.36 21.2 IN 55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN Made to Order Specifications (For details, refer to pages 1395 to 1498.) 141 101 60.3 201 OUT 16 6 121 86.0 51.6 172 IN Symbol Specifications 220 157 94.2 314 OUT

Pressure Gauge Guide

Symbol 46 42.5 Outside diameter Indicator light Max. display pressure Symbol 10 1.0 Unit: MPa Without indicator light Nil L2 Neon light (100 VAC/220 VAC) Attachment (Cover ring assembly) L5 LED/24 VDC Connection thread Without cover ring assembly Symbol Specifications Symbol Size Nil 01 R 1 8 Clear cover has no protrusion. (Clear cover is irremovable.)

IS3000

Light Assembly For 110 VAC: 1530118-1 220 VAC: 1530118-2 24 VDC: 1530118-5 Able to convert into L1, L2, L5 by changing each light assembly. 16-9-4

VCA

250 260 8 238.5 248.5 278.5 288.5 2 67.5 77.5 107.5 117.5 3 96 106 136 146 L1 Side ported L2 VV2CA2 L1 Front ported L2 7 Direct Operated 2 Port for Air Series VCA Dimensions/VCA30/40 Manifold L1 (front ported) L2 (front ported) 2-1/2 (VCA30), 3/4 (VCA40) IN port (side ported) 5.5 L2 (side ported) L1 (side ported) 5.5 F E Manual override 2-6.4 Mounting hole C B A G H 1 Q l = 300 S U V Y (

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25, 32, 40 50, 100, 150, 200, 250, 300 350, 400, 450, 500, 550, 600 1500 Stroke adjustment unit symbol For stroke adjustment unit, refer to page 1209. Intermediate fixing spacer is not available for end lock mounting side. Strokes are manufacturable in 1 mm increments, up to the maximum stroke.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 Bore size (mm) 16 20 90 110 PP SS 2.5 5.0 PA 40 50 PB PG 3.5 4.5 Q 153 191 QQ QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220

MY1

290 11 14 57 65 168 200 15 16 M8 x 1.25 47 50 44 60 122 147 105 M10 x 1.5 PA NH NW PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 50 63 090 110 60 70 118 142 120 140 186 220 10 12 26 42 380 436 28 30 35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490 74 92 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Pressure Gauge Guide

(Red) 110, 220 VAC 24 VDC NC. (Red) Clear cover is not removable. NO. (White) NO. (White) Load Load COM. (Black) COM. (Black) The arrow in the diagram indicates the direction of the pressure increase. The light turns OFF when the pressure becomes higher than the set pressure and turns ON when the pressure becomes lower than the set pressure.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

ISG Display pressure value ZSM Note) When an output is reversed, n_1, H_1, n_2, H_2 will be rectified. 0 Applied pressure + Displayed value at the time of shipment Possible Set Range for Auto-Shift Input Adjustable range of display calibration function Possible set range Regulating pressure range Compound pressure 220 to 220 kPa 110.0 to 110.0 kPa Note) When the precision indicator setting

Dual Rod Cylinder Series CXSJ/CXS

CXSW20-150 CXSW20-175 CXSW20-200 120 178 60 10 130 198 70 20 44.5 44.5 Standard stroke Long stroke (-XB11) 140 30 218 80 2 x 2 x M5 x 0.8 thread depth 4.5 (Piping port) 150 238 40 90 (Opposite side: Same) 160 258 100 50 (Z) (30) 6 (30) 4 x M4 x 0.7 thread depth 6 2 x M6 x 1 thread depth 10 185 308 75 125 210 358 150 100 235 408 125 175 260 458 150 200 50 0.2 285 508 225 175 310 558 200 250

PSxx-OMF0005CN

g 205 g278 g+4 g 1 2LED -26No.PS-OMF0005CN-E EXH 1 1 2 3 4 5 6 L1 46 84 122 160 198 236 L2 38 76 114 152 L3 38 76 114 152 190 DIN EXH DIN 1 2 3 4 5 6 L1 46 84 122 160 198 236 1 L2 38 76 114 152 L3 38 76 114 152 190 L4 62.5 120 162.5 200 237.5 275 L5 73 135.5 173 210.5 248 285.5 DIN ISA-5-* * 2 3 4 5 6 7 -27No.PS-OMF0005CN-E EXH SUP RcNPTG1/8 1 1 2 3 4 5 6 L1 106 144 182 220

End Lock Cylinder Series CBG1

With double locks: CBG1BN Bore size Stroke W (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 S + Stroke 80 146 220 ZZ + Stroke 100 146 220 With rod boot IJ e JH 8 l f h + l JW ZZ + l + Stroke (mm) Front lock (-R) ZZ Double locks (-W) Rear lock (-H) Bore size (mm) e f h IJ JH JW l ZZ ZZ 20 30 16 55 27 (14.5) (11.5) 138 137 (145) 149 25 30 17 62 32

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 090 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 SS 10 13 Hole sizes for centralized piping on the bottom Bore size (mm) 50 63 S 8 9 WX 74 92 Y 18 18 Applicable

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Model VX21 VX22 VX23 2 mm 3 mm Orifice size Orifice size Solenoid Coil 4.5 mm Coil: Class B, Class H 6 mm 8 mm Rated Voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 240 VAC, 230 VAC, 48 VAC, 24 VDC, 12 VDC 10 mm 1 2 1 4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

0.5

Ion generation method Corona discharge type Method of applying voltage DC type Applied voltage 5 kV Offset voltage (Ion balance)*1 Within 13 V Power supply voltage 24 VDC 10% Power consumption 220 mA or less 140 mA or less 270 mA or less 250 mA or less 170 mA or less 270 mA or less NPN open collector output PNP open collector output Maximum load current: 150 mA Residual voltage: 1 V or less

INFORMATION Step Motor Controller 5 types of communication protocols New New

(Screw mounting) 240 (DIN rail mounting) 210 (Screw mounting) 230 (DIN rail mounting) 220 (Screw mounting) 240 (DIN rail mounting) 210 (Screw mounting) 230 (DIN rail mounting) 190 (Screw mounting) 210 (DIN rail mounting) *1 Please note that versions are subject to change. *2 Use a shielded communication cable with CAT5 or higher for the PROFINET, EtherNet/IP, and EtherCAT. *3 The files can

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.