Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3
MIS12-30D MIS 10 300 MIS20-10D 20 355 15 5 MIS20-20D 30 410 MIS20-30D 6 Series MIW/MIS Construction Option Double finger type/MIW With scraper With stroke adjuster Single finger type/MIS Description Material Note Parts list: Standard Description Material Note Parts list: Option/With stroke adjuster No.
to 0.7 MPa VC Pilot air Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5.5 MPa 10.5 MPa Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice size (mm) Flow characteristics Av x 10-5 VDW 5 to 50C 20 times/min Vertical upwards VQ Rc 1 2 Rc 3 8 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 VX2 7.1 86 8.7 110 10.6 190
Supply ftsssure Efu 0.5% pr 7 PSIG (0.5 Ksf/cm,) Chanse A|ailabb Cylinder Siz5 Bore: 2" to 4" (50-100mm) Stroke: 1" (25 mm) min. to 12" (300 mm) max.
of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81 2.56 3.31 4.06 4.80 5.55 6.30 7.05 7.80 (27) (46) (65) (84) (103) (122) (141) (160) (179) (198) NARM2000 L1 1.89 2.99 4.09 5.20 6.30 7.40 8.50 9.61 10.71 11.81 (48) (76) (104) (132) (160) (188) (216) (244) (272) (300
Indicator light (With "Z") 69(Without "Z": 59) 59(Without "Z": 49) 190 NAMUR Interface 3 Port Solenoid Valve VFN200N Series NAMUR Mounting Pattern Axis A-A' can be aligned to suit.
30 MIS12-30D 30, 50 mm 300 10 MIS20-10D MIS D5 15 355 20 MIS20-20D Made to Order (For detailes, refer to page 2020.) 30 410 MIS20-30D -X Symbol Specifications 30 800 MIS25-30D 10 15 -X4 -X5 -X63 -X79 Heat resistant (-10 to 100C) Individual -X 50 1000 MIS25-50D Fluororubber seal 30 1350 MIS32-30D Fluorine grease 18 50 50 1650 MIS32-50D Grease for food 1423
Data type: 8 bit UInteger Value Function definition Description 128 Device Reset Restarts the device 129 Application Reset Reset of the peak/bottom value Reset of the accumulated flow value 130 Restore Factory Reset Initialize the set value to the default value 160 Zero clear Conduct a zero-clear function 170 Flow peak bottom Reset Reset of peak/bottom value 190 Integrated flow Reset Reset
Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice diameter (mm) Flow characteristics Av x 10-6m2 5.5 MPa 10.5 MPa 5 to 50C Note 1) 20 times/min Vertical upwards 1 2 3 8 3 4 1 3 8 1 2 3 4 1 3 8 1 2 3 4 1 7.1 86 8.7 110 10.6 190 14.3 15 3.9 29 5.2 38 6.2 58 7.3 54 8 75 9.5 140 13 210 15.7 46 Pilot port size Mass (kg) Face-to-face dimension
Auto switch mounting grooves have replaced the NCQ2's mounting rails, preventing projection of auto switches and improving ease and safety of work.Compact, double acting, single rod, large bore , Bore size (mm): 125, 140, 160 , Standard stroke (mm): 10 through 300 , Through hole mount, Auto switch capable, Compact Cylinder, NCQ2-Z, COMPACT CYLINDER, E38, 190 lb
Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Compact, double acting, double rod, large bore, Bore size *: 125, 140, 160, 180, 200, Standard stroke *: 10 through 300, Port thread types: Rc, NPT, G, Auto switch capable, Compact Cylinder, CQ2-Z, COMPACT CYLINDER, 493, 190 lb
Communication response time [ms] (guideline) MODBUS ASCII MODBUS RTU Function 2400bps 19200bps 57600bps 2400bps 19200bps 57600bps Reading of Step Data /Direct Operation Step Data (1 word) 155 25 10 90 15 10 Setting of Step Data /Direct Operation Step Data (1 word) 190 30 10 110 20 10 Reading of input signal status (1 bit) 145 20 10 85 15 10 Reading of output signal status and internal flags
160 150 30 50 20 60 80 90 43+0.21S 890 660 480 385 325 325 325 Individual -X 50 80 30 105 120 160 55+0.21S 1700 1370 1090 760 640 580 570 570 100 170 71 205 140 310 150+0.45S 3190 2670 2150 1630 1250 1100 1010 980 960 150 215 125 300 240 540 220+0.45S 4710 4140 3270 2650 2090 1840 1690 1680 1660 55
D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100 105 110 115 120 125 130 135 140 165 190
Supply ftsssure Efu 0.5% pr 7 PSIG (0.5 Ksf/cm,) Chanse A|ailabb Cylinder Siz5 Bore: 2" to 4" (50-100mm) Stroke: 1" (25 mm) min. to 12" (300 mm) max.
MIS12-30D MIS 10 300 MIS20-10D 20 355 15 5 MIS20-20D 30 410 MIS20-30D 6 Series MIW/MIS Construction Option Double finger type/MIW With scraper With stroke adjuster Single finger type/MIS Description Material Note Parts list: Standard Description Material Note Parts list: Option/With stroke adjuster No.
Martensitic stainless steel used for the body and guide block. 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 Stroke adjuster 10 Three types available: Rubber stopper, Metal stopper and Shock absorber. 20 Shown with shock absorber 30 40 50 60 70 80 90 Highly flexible piping methods 100 Auto switch capable Two types can be selected, side and axial.
The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (mechanical operation style): 300 c.p.m. or less, Weight (Basic): 260g, MECHANICAL VALVE, MECHANICAL VALVE, I98, 190 lb
Vertical foot, Lateral foot: Body mounting bolt Double clevis: Clevis pin, C-type retaining ring for shaft, Body mounting bolt 2 Series CQU Compact Cylinder: Plate Type Double Acting, Single Rod Mass Unit (g) Cylinder stroke (mm) Size 5 10 15 20 25 30 35 40 45 50 75 100 20 105 115 125 134 144 153 163 173 182 192 25 127 138 148 159 169 180 190 201 211 222 32 199 214 228 243 257 272 286
Note 2) Model MGPL (Ball bushing bearing) cannot be used as a stopper. 63 600 500 400 50 300 40 200 32 100 0 10 20 30 40 Transfer speed (m/min) 8-20-6 7 Compact Guide Cylinder Series MGQ Operating Range when Used as Lifter Select the bore size so that the total load mass is bellow the theoretical output (see the table below). l l Bore size (mm) Theoretical output m m 12, 16 40% or below