HEC_W-E

Table 3-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (S/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

Clean Room Rodless Cylinder Series CYP ø15, ø32

Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 200 mm/s) Note 5) The data above provides a guide for selection but is not guaranteed. Hexagon wrench + direction direction Inner cover holding screw Maintenance Caution 1.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

95 97 125 ZZ Bore size 8 8 12 13 Thread depth A1 Female thread MM 20 25 32 40 32, 40 When female thread is used, use a thin wrench when tightening the piston rod.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 200 mm/s) Note 5) The data above provides a guide for selection but is not guaranteed. Hexagon wrench + direction direction Inner cover holding screw Maintenance Caution 1.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

CYP

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

CYPSeries

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

CYPSeries

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Work piece weight: 5kg, Average speed: 2000mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

VXD21/22/23

VN Solenoid valve option Nil Standard Rated voltage 1 2 3 4 5 6 7 8 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-9 by Applicable Fluids Check List for special fluids outside of the standard.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

LEC-OM02704CN

(FR-BSF01FR-BLF()) 13 21 13 (2) (a) () TDKZCAT3035-1330NECESD-SR-25 ZCAT3035-1330(TDK) [] [mm] 10100MHz 100500MHz 391 131 341 80 150 301 TDK (ZCAT3035-1330) (b) () ACACAC MC 20cm ()972A-2003 50411 (AC200V) AC[V] C[F] R[] [mm] AC[V] 200 0.5 50(1W) T-C 181.5 1000(15s) 6 10 10 103 103 4 151 31.51 200 200 481.5 DCDC 4 2 RA 13 22 13 (c) AERSBAN-SET SD ( A B ) 40 2-5 17.5

WRF100

200 Unclamped position T200 S200 240 240 T240 S240 270 T270 Limit switch Clamped position Note) This product does not include the limit switch.

13

T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2. Max. suction flow rate Qmax = (2 to 3) x Q /min (ANR) Q : Average suction flow rate /min (ANR) V : Piping capacity T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) 2.

CLA

Off-DeJ av 200 50 mS Off-Delay time 20 -Auto SWitch Series eLA Reed Type Internal Circuit 0-853, 0-A53 0-A64, 0-864 D-A59W, D-859W Choke COIl a,own (t-) (red) Z8M! dod, ZOl'ler 0I0de '--c:::=~J_~ Blue t-)(b!

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

Low Friction Cylinders Series MQ

Bore size [mm] (Pressure receiving diameter) 4 6 10 16 20 Operating pressure range [MPa] Mass of moving parts [g] 4 8 24 62 103 Thrust control standard [N] 0.01 to 8 0.03 to 19 0.08 to 50 0.20 to 140 0.30 to 200 Stroke [mm] 0.001 to 0.7 10 (Excluding the mass of moving parts) 1170 (Metal Seal Type/Single Acting) /4, 6, 10, 16, 20 control range of 0.01 N to 200 N Application Examples: For

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)