Vacuum

Vacuum Switch Specifications Model zsMl-T115 zsMl-T121 Switch typs Non-contact Contact (reed) Media Air Um Prssure 75 PSI (2-5.skgflcm,) : Range re, Range . , . 40*140.F (5-60"C) -8 * -26 in.Hg C200 -600 mmHg) mum Hystsresis 4.3 in.Hg (110 mmHs) 5.9 in.Hg (150 mmHg) 24 VDC '115 VAC Lighting under ON condition (LED) ,t"r L""F -':.,f ; + ] Operation Use vacuum setting screw to adjust set point

Vacuum

Vacuum Switch Specifications Model zsMl-T115 zsMl-T121 Switch typs Non-contact Contact (reed) Media Air Um Prssure 75 PSI (2-5.skgflcm,) : Range re, Range . , . 40*140.F (5-60"C) -8 * -26 in.Hg C200 -600 mmHg) mum Hystsresis 4.3 in.Hg (110 mmHs) 5.9 in.Hg (150 mmHg) 24 VDC '115 VAC Lighting under ON condition (LED) ,t"r L""F -':.,f ; + ] Operation Use vacuum setting screw to adjust set point

NCM

There are no flats on the E type 150 bore rear tang. Note 2) FF dimension for NCMC 150 is not applicable. There are no threads on the C type 150 bore rear tang.

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

Air Cylinder

2761 Stroke (In Inches and Hundredths of Inches) NC1A 150 04 0400 Bore 150 200 250 325 400 Stroke (In Inches and Hundredths of Inches) Note: Quantity is one piece.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

REC

45 150 to 700 26 M10 X 1.25 32 6 8 46.5 5.5 22 19.5 17 12 13 11 45 150 to 1000 26 M14 X 1.5 40 8 10 56.2 7 24 21 22 14 16 12.5 50 200 to1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5 M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22

Membrane Air Dryer

230 170 240 300 50 100 150 54 68 100 25 40 80 Outlet air atmospheric pressure dew point oC -40 -60 *Note2 Inlet air flow rate L/min(ANR) Outlet air flow rate L/min(ANR) Standard Performance conditions Purge air flow rate L/min(ANR) Inlet air pressure MPa *Note3 0.7 25 Inlet air temperature oC Inlet air saturation temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In

IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

TA301

Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZY ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZF Manifold ZP SP ZCUK AMJ AMV Pitch AEP HEP Related Equipment (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228

New

5 ON 1A OFF Power supply switch COM FG AC2 AC1 SV9 SV10 SV7 SV8 SV5 SV6 SV3 SV4 SV1 SV2 5 140 5 Output terminal block Common terminal block 4 x 4.5 Power supply terminal block 34 or less 38 or less 26 10 or more 31 Series VXF2/VXFA2 Specific Product Precautions 1 Be sure to read before handling.

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa Supply pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 ARJ 0.202 0.15 Set point AR425 to 935 0.3 0.200 0.1 0.2 AMR 0.198 0.05 0.1 ARM 0.196 ARP 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

Speed Controller: Standard Type Series AS In-line Type

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

CXS15-90-XB19 90 169 55 150 CXS15-100-XB19 100 179 160 CXS20--XB19 ZZ S 14 10 SS 25 2-3.4 through 2-6.5 counter bore depth 3.3 2-4 x 20l AW (spring pin) 30 Z 23 1 7 15 1 62 50 0.2 6.3 53 28 64 3.1 5 M6 x 1.0 x 18.5 l and M6 x 1.0 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through) 2-M4 x 0.7 Thread depth 6 11.5 8-M4 x 0.7 thread depth 5.5 (same on reverse side) 30 (Z) 12.5 3.5 Model S ZZ Z