IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

pa

Air consumption (l/min (ANR)) 140 120 SUP = 0.5 MPa 100 SUP = 0.3 MPa 80 SUP = 0.2 MPa 60 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air Consumption 400 Air consumption (l/min (ANR)) SUP = 0.5 MPa 350 300 Calculating Air Consumption (PA3000) 250 SUP = 0.3 MPa 200 Find the air consumption for operation with a 4 Hz switching cycle and pilot air pressure of 0.3 MPa from the air consumption graph

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-32D MHS2-32D 150 150 Pressure 0.6MPa Pressure 0.6MPa 120 120 0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 90 90 0.3MPa 0.3MPa 60 60 0.2MPa 0.2MPa F 30 30 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L mm Gripping point L mm MHS2-40D MHS2-40D 250 250 Pressure 0.6MPa Pressure 0.6MPa 200 200 External gripping

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Also available without switch rails and magnets. 110 120 Shown without switch rails and magnets 130 140 150 160 170 Can be mounted from three directions. Highly flexible mounting Work piece mounting taps 1. Using table top taps 2. Using table side taps 1. Using tapped holes 2. Using through holes 3.

Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes.

Fieldbus System

Configuration file EDS file I/O occupation area (Inputs/Outputs) Max. (512 inputs/512 outputs) IP address setting range SI Unit switch settings: 192.168.0 or 1.1 to 254 Through DHCP server: Optional address Vendor ID: 7 (SMC Corporation) Product type: 12 (Communication Adapter) Product code: 126 EX600-SENl Device information Internal current consumption (Power supply for Control/Input) 120

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Electric Actuator

to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 A 10 m 5: The motor and encoder cables are included.

Hydraulic Filters

120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed L-type block companion flange Connection part dimensions/ Companion flange Female threaded companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) P E (Rc) L-type block Y Z G Q

Bernoulli Gripper

160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 250 160 140 200 120 100 150 80 100 60 40 50 20 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure

Cylinder with Lock Series CNS

125 D-Y7BAL 20 + 45 (n 2) 2 (n = 4, 8, 12, 16 ) 115 + 45 (n 4) 2 120 + 45 (n 4) 2 125 + 45 (n 4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 774 Series CNS Cylinder with Lock Double Acting, Single Rod Operating Range Auto Switch Mounting Bracket: Part No.

MY1

85 MY1B100 25 85 157 400 70 79.5 190 400 18 200 140 M12 x 1.75 95 45 176 280 (mm) QQ QW TT VV UU YH WW YW YY Model PG PF PP Q RR SS XX Z 35 90 30 60 40 122 25 140 28 MY1B80 53 660 61 15 90 690 15 22 38 120 40 70 48 155 28 176 35 MY1B100 20 42 69 760 75 20 120 800 Y 2-d R WX D Bottom ported (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y d D R Applicable O-ring Model

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 74 56 6 122 104 8 154 136 10 186 168 20 346 328 2 58 40 4 90 72 5 106 88 7 138 120 9 170 152 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1.2-45 Series SYJ5000 40 Type Manifold: Bottom Ported/SS5YJ5-40Station -M5 Grommet (G), (H) (Lead wire length) G: 300 H: 600 4-4.5 (Mounting holes) 13 (Pitch) P=16 21 103.2 (GZ, GS

IIIIIII

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

g 2 m: Approx. 200 g 3 m: Approx. 280 g 5 m: Approx. 440 g 10 m: Approx. 840 g 0.5 m: Approx. 80 g 1 m: Approx. 120 g 2 m: Approx. 205 g 3 m: Approx. 285 g 5 m: Approx. 450 g 10 m: Approx. 865 g Weight *1 Can also be connected to an M12 5-pin socket A-coded connector 223-1 A Communication Cable/Connector M12 Example of Connection PLC EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/