PA3000/5000/PAX1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Load Blocking Mass and Center of Gravity for Each Workpiece 5 42.5 65 150 Center of gravity Mass mn Workpiece Wn Y-axis Yn X-axis Xn Z-axis Zn Z X Wa 0 mm 5 mm 0.88 kg 65 mm 111 210 Wb 0 mm 42.5 mm 4.35 kg 150 mm Y Y Wc 111 mm 42.5 mm 0.795 kg 150 mm Wd 210 mm 42.5 mm 0.5 kg 150 mm n = a, b, c, d 3.

ISA2

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Compact Cylinder with Solenoid Valve/

-100 135 x 135L M8 x 60L 60 15 CVQM405 45 M5 x 45L x 65L 65 20 10 50 x 50L x 70L 70 25 15 55 x 55L x 75L 75 30 20 60 x 60L x 80L 80 35 25 65 14.5 x 65L x 85L 85 40 30 70 x 70L x 90L 90 7.5 45 35 75 x 75L x 95L 95 50 40 80 x 80L x 100L 100 75 45 85 x 85L x 125L 125 -100 50 90 x 90L x 150L 150 75 115 x 115L -100 140 x 140L Plate Non-rotating Accuracy Plate Allowable Rotational Torque Non-rotating

3

Symbol Rotation angle Symbol Rotation angle 90 Standard 90 IN OUT Nil A IN OUT 90 90 180 180 A IN OUT B IN OUT 180 180 270 270 B IN OUT IN OUT C 270 270 IN OUT C *1 Available for the VXS23 to 26. *2 Bracket is packed in the same container as the main body. *1 Available for the VXS23 to 26. *2 Bracket is packed in the same container as the main body.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(LEJS63) 120 Model Selection LEJ Series AC Servo Motor Clean Room Specication SpeedWork Load Graph/Required Conditions for Regeneration Option(Guide) LEJS40/Ball Screw Drive LEJS63/Ball Screw Drive Horizontal Horizontal 0 10 20 30 40 50 60 70 80 90 60 Lead 8: LEJS40B Lead 10: LEJS63B LEF A 50 Area where the regeneration option is required.

NCRAI seies

W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

Bag Filter

B.C.D570 950 475 Davit for cover Air release Rc1/4 Gauge port in the inlet side (Pressure gauge) 150(6B)JIS10KFF E (When the cover is lifted.)

air-filter-e

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Compact Electric Actuator Series LG1

Servo malfunction indicator PL For power supply switching A surge killer should be attached to the electromagnetic contactor and relay. 5Ry Power supply OFF 1MC ON SUP 1MC 5Ry SGDE servomotor Motor 1 1MC SGDE servo pack R U V 2 M 1MC T 3 W 4 1CN 150 PULS 1 2 3 4 5 6 Be certain to ground.

Air Preparation Equipment

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread S 10 94 60 23 20 132 70 51 30 142 80 40 178 90 77 50 188 100 E D C B 10 49 32.9 24 P 10 8 M5 x 04 06 2.5 Applicable tubing O.D.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Byte 90 Output 8 to 15 SEN3 (Unit5) Byte 91 Byte 91 Output 16 to 23 Byte 92 Byte 92 Output 24 to 31 Byte 93 Byte 93 Padding data Total 90 byte Total 94 byte -83No.EX-OMX1011 Details of I/O map of the IO-Link master unit I/O map of the IO-Link master unit is described below.

JXCx-OMT0001CN

-25No.JXC-OMT0001CN-C 4. 4.1. 4 (DC24V) A/B (800 /) DC24V10% : 350mA 1) DC24V10% : 2) USB2.0(Full Speed 12Mbps) EEPROM LED PWR RUN USB USB LED ALM NS EtherNet/IP MS L/A / 100 EtherNet/IP 3) 20m oC 40 oC () 0 90%RH ) oC 60 oC () -10 90%RH ) 50M(DC500V) 1050 g() 1100 g(DIN ) 1) 2 3) -26No.JXC-OMT0001CN-C 4.2 EtherNet/IP TM 1) (CT12) EtherNet/IP 10Mbps/100Mbps

OMR0032

% or less (no condensation) Storage temperature range (oC) -10 to 60oC (No condensation, no freezing) Storage humidity range 90% or less (no condensation) Insulation resistance 50 M (500 VDC) between FG and case Weight Note 5) 130 g (direct mounting type) 150 g (DIN rail mounting type) Note 1) Step data input type or pulse input type can be selected using the configuration software.

Compact

200 0.3/0.4 100 0.3/0.39 150 100 50 50 0 0 0 20 40 60 0 20 40 60 Allowable overhang L [mm] Allowable overhang L [mm] Pressing force in the dotted line ranges are reference values as the pressing force may vary in these ranges. 12 MXZ Series For Stopper (1) Confirm that the stopper jig weight and overhang are within the allowable range as shown in the graphs for transfer.