51

H ZZ MM Depth A1 CG1 20 25 32 40 50 63 80 100 Up to 200 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 94 102 104 114 144 144 178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

VCC

Description Symbol A B C D E Description For piping 12 x 9 40 swivel elbow For piping 10 x 8 40 swivel elbow For piping 10 x 7.5 40 swivel elbow For piping 8 x 6 40 swivel elbow For piping 6 x 4 40 swivel elbow Part no. VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

Wedge Cam Operation Provides

External Holding Force Internal Holding Force MHKL2-12D MHKL2-12D 20 25 Pressure 0.6MPa Pressure 0.6MPa 20 Holding force (N) Holding force (N) 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 10 20 30 40 10 20 30 40 50 50 Holding point L(mm) Holding point L(mm) External hold Series MHKL2 Internal hold Series MHKL2 MHKL2-16D MHKL2-16D 50 50 40 40 Holding force

Air Cylinder

0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 63.

42

(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure

Hydraulic Filters

M10 x 1.5 x 30 M10 x 1.5 x 40 M12 x 1.75 x 40 M12 x 1.75 x 45 M12 x 1.75 x 40 M12 x 1.75 x 45 M16 x 2 x 50 M16 x 2 x 60 M16 x 2 x 50 M16 x 2 x 60 M20 x 2.5 x 65 M22 x 2.5 x 65 4 x N depth Q A 06 G30 SSA20 F (Element removal dimension) Differential pressure indicator G (60) (65) G (30) (34) Blanking cap 08 G35 SSA25 2 x d G E H INLET X OUTLET X' INLET OUTLET OUTLET INLET 10 G40 SSA32 Differential

Modular Type Regulator Series AR

1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT L,L H K Y M H L E Model L W E W M LQ3H11-F LQ3H12-F LQ3H21-F LQ3H22-F LQ3H31-F LQ3H32-F LQ3H33-F LQ3H34-F LQ3H35-F LQ3H36-F LQ3H41-F LQ3H42-F LQ3H43-F LQ3H51-F LQ3H52-F LQ3H53-F LQ3H61-F LQ3H62-F LQ3H63-F 4 3 M 10 9 11 35 34 14 10 18.5 1/8" Y 40 45 39 44 18.5 21.5 1/8" 1/4" H 6 17 16 16 20 14 (E,E) 10 8 10 8 10 8 KK 50.5 47.5 18.5 1/8" D 22.5 19.5 21 55 52 25 18

0.4

A silencer (AN200-KM8) is interfered with fittings. 13.5 40 Downward Upward DIN rail mounting bracket [-D] VVQ1000-57A {For F/L/M/P/S (EX500) kit} VVQC1000-57A-S {For S (EX250) kit} VVQC1000-57A-T (For T kit) DIN rail clamp screw Mounting screws are attached. It is used for mounting a manifold on a DIN rail.

0.4

unit S kit P kit F kit L kit !

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

e b d f h11 (Shaft) f H9 (Hole) l1 c (Min.) a (Max.) 32 GKM10-20 M10 x 1.25 10+0.5 +0.15 40 10 10 52 20 20 40 GKM12-24 M12 x 1.25 12+0.5 +0.15 48 12 12 62 24 24 50, 63 GKM16-32 M16 x 1.5 16+0.5 +0.15 64 16 16 83 32 32 80, 100 GKM20-40 M20 x 1.5 20+0.5 +0.15 80 20 20 105 40 40 * Supplied with clevis pin and clevis pin bracket.

CV/MVGQ

H1 AL A K F N N 71 LL S + Stroke H ZZ + Stroke ZZ + l + Stroke h + l Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 C D E F H1 I K KA LL MM N Q S J Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 30 35 35 40 40 84 90 98 116 126 The minimum stroke of the one with rod boot is

CJ2

Axial foot 16 40 Mounting bracket weight Front flange 5 15 This basic weight includes weight of rod end nut.

CS1

(mm) S S U Z1 ZZ ZZ1 H h Z ZZ e f Z1 ZZ1 Z l 125 140 160 180 200 125 140 160 180 200 250 300 to 1000 98 302 110 273 302 75 40 133 296 325 273 296 325 98 35 0.2 Stroke Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1000 315 110 283 315 75 40 133 306 338 98 283 306 338 0.2 Stroke 98 40 to 1200 106 106 342 120 306 342 75 40 141 327 363 306 327 363 0.2 Stroke 45 to 1200 Lube Non-lube 111

New

Cable 6 to 12 G1/2 Q F S D F Q 280 G1/2 D 45 (42) (44) 31.5 With full-wave rectifier R C E C R E J J OUT IN IN OUT 2 x M Depth 5 2 x M Depth 5 G A H A G H 2 x P Port size B1 B B B1 2 x P Port size Bracket mounting hole dimensions (mm) A B B1 C D E F G Port size P a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

0.55

02 03 A B 1/4, 3/8 2(A) port 2 x 4.2 (For mounting) 41.1 1/8 12(PA) port 26 NC 12 2A 3.5 31 25.6 (1.6) 83 (9) 91 2 x 4.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1l (-F) 02 03 A

AIR COMBINATION

71.3 157.6 156 152 188.9 156.1 171.6 176.1 Note) For the AC20C-B only, the position of the pressure gauge is above the center of the piping. 26 to to Standard specifications Bracket mount C E F G J K Model Note) P1 P2 A B M Q1 Q2 R S U V AC20D-B 1/8 83.2 87.6 72.4 41.6 40 28.5 5 30 24 33 5.5 12 3.5 29 1/81/4 1/43/8 AC30D-B 1/8 110.2 115.1 85.6 30 55.1 50 29.4 3.5 41 35 7 14 4 41 AC40D-B