AIR COMBINATION

Example AC30-03DM-KSTV-13NR-A AC 30 03 DG 1N A F 1N 1 3 4 5 6 2 1 Symbol Description Body size 10 20 25 30 40 Nil Metric thread (M5) c Pipe thread type 2 Note 1) Note 2) Port size 3 Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied. Note 4) Note 3) N.O.

2-Color Display High Precision

ZSE40A(F)/ISE40A-01--A ZSE40A(F)/ISE40A-N01--A With bracket 30 20 20 55 40 1.6 43.2 4.5 11.5 15 4.5 6.5 20 ZSE40A(F)/ISE40A-01--D ZSE40A(F)/ISE40A-N01--D With bracket 30 20 20 55 40 1.6 35 43.2 11.5 15 4.5 4.2 7.5 7.2 22 7 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-W1--A ZSE40A(F)/ISE40A-WF1--A With bracket 30 55 40 1.6 47.2 4.5 11.5 15 4.5 6.5 20 ZSE40A(F)/ISE40A-W1--B ZSE40A(F)

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

PFxx-OMU0002

[F 30] Setting of accumulated value hold complete : The value is stored in memory every 2 or 5 minutes.

51

64 74 16 20 22 30 36 46 28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

Digital Flow Switch (Remote type monitor unit)

[F 0] Sensor selection is completed. -26No.PF-OMN0012-H [F 1] Setting of OUT1 The output mode of OUT1 can be selected. 1. Selection of output mode Window comparator Accumulated output Accumulated pulse output Hysteresis HYS WIN ACCUMU PLS 2. Setting of switch operation 1_P/1_N (Page 28) (Display type) Setting of Add/dEC (Page 30) 3.

3

Symbol Port gal gal gal/min gal/min size 11 21 F J 25 30 $ 25A 30A 32 mm 38 mm L/min L $ JIS K6742 equivalent Under the New Measurement Law, units other than SI (symbol M) cannot be used in Japan.

Precautions 1

D Eh8 CZ CX CD B1 AL A NA N Bore size (mm) 20 25 32 40 Stroke range 0 0.033 M8 x 1.25 30 5 28 65.3 5 41 13 8 19 10 9 13 15.5 18 24 Up to 300 15 20 0 0.033 30 5.5 33.5 70.5 6 45 13 10 19 10 9 17 19.5 22 30 Up to 300 15 26 M10 x 1.25 0 0.033 30 5.5 37.5 76.5 6 45 13 12 19 10 9 17 19.5 22 34.5 Up to 300 15 26 M10 x 1.25 0 0.039 39 7 46.5 84.5 8 50 16 14 30 15 10 22 21 24 42.5 Up to 300 21.5

CV/MVGQ

(n 4) 2 n = 2, 4, 6, 8 10 + 30 (n 2) 2 n = 4, 8, 12, 16 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 90 + 30 (n 4) 2 n = 4, 8, 12, 16 10-15-62

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 7.6 5.1 2.6 0.6 0.1 7.6 5.1 2.6 0.6 0.1 30 30 5.1 3.4 1.7 0.4 0.1 5.1 3.4 1.7 0.4

ZSE F/ISE

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 16-2-30 7 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Smooth Cylinder

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

LEC-OM02904

(1) (1) (1) 31 32 33 34 1 (2) 35 36 2 37 3D 45 (1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

Digital Pressure Switch

0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving mode 49 F81 Security code 50 F90 Setting of all functions 52 F96 Number of pressurizing

ZX

Specifications ZX1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Unit no.