Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

CQS

L F G D Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm In the case of long strokes, use either ends tapped mounting or bracket mounting. Mounting brackets are shipped together, (but not assembled).

4-channel Flow Monitor ( compatible)

Error output -11No.PF-OMA1011-A Term Definition F A mode in which setting of functions is performed. If any function settings need to be changed from the factory default, each setting can be selected with "F".

PSxx-OMU0005CN

[F 1] OUT1 1 2 2 -33No.PS-OMU0005CN-C H_1 WH1 WH1 H_1 WH1 WH1 OFF OFF 1Er689o.rEr12() : OUT1OUT2"1""2"()P_1P_2 -34No.PS-OMU0005CN-C [F 2] OUT2 OUT2 ONON 34 <> [F 2] OFF [OFF]OFF 25 [Err] [P_2] [P2L][P2H] [P_2][n_2] P n (62 ) -35No.PS-OMU0005CN-C 25 [H_2] [WH2] (62 ) 27 ON ON ON ON OFF OFF OFF OFF OUT2 OUT2 OUT1 OUT1 [F 2] OUT2 1 2 2 -36No.PS-OMU0005CN-C [F 3] <>

PSxx-OMV0008CN

23 [H_2] [WH2] (58) SET 25 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -36No.PS-OMV0008CN-E [F 3] 0.0030.00 sec.0.01 sec. <> UPDOWN[F 3] SET UP DOWN SET [F 3] 190% 2(253336) -37No.PS-OMV0008CN-E [F 4] <> ,UPDOWN[F 4] SET UP DOWN SET [F 4] SET SET (39) -38No.PS-OMV0008CN-E OUT1 SET[AP1 REdY] (OUT1[AP1

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

VZS

D U Applicable Plug Assembly (D-sub connector cable assembly) (Option) Component parts Plug MIL standard D-sub connector D-sub connector Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Cable length 1.5 m 3 m 5 m 8 m Assembly part no. VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7.

Compressed Air Preparation Filter

42.5 3 167.4 57.2 Size 40 2 1/4, 3/8, 1/2 145.2 25.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 3 220.4 75.2 Size 50 2 3/4, 1 186.2 32 93.1 30 45 70 50 70 11 20 8 60 80 3 282.4 96.2 Size 60 2 1 186.2 32 93.1 30 45 70 50 70 11 20 8 60 80 3 282.4 96.2 25 Modular Connection Example (Dimensions) AFF/AM/AMD/AMK Series Combination example e A Y300T-D S F Line Filter AFF30-03-D 1 pc.

Modular Type Filter Regulator Series AW

Contact P/A regarding the specifications for PSI unit and F .

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

240

Table displacement due to pitch moment load (marked with the arrow) Table displacement due to yaw moment load (marked with the arrow) Table displacement due to roll moment load (marked with A) F A F F L L Distance L [mm] Model LEPS6 LEPS10 Stroke [mm] 25 50 25 50 Distance L [mm] 53.0 77.0 59.5 82.0 LEPS6 LEPS6 LEPS6 0.30 0.30 0.10 0.25 0.25 Displacement [mm] Displacement [mm] Displacement

15

LEY63 Workpiece Load: F [N] 10 LEY32 LEY25 Center of gravity 1 0 100 200 300 400 500 600 700 800 900 1000 Stroke [mm] 852 Motorless Type Electric Actuator/ Rod Type LEY Series LEY25, 32, 63 How to Order q y u i o NZ 25 500 B w LEY e r t H q Accuracy w Size r Motor type t Lead [mm] y Stroke [mm] Symbol LEY25 LEY32 LEY63 A 12 16 (20) 20 B 6 8 (10) 10 C 3 4 (5) 5 L 2.862 25 32 63 Nil Basic

5 Port Solenoid Valve SY Series

) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 21.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3120-W0(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx. 300 (Lead wire length) Approx. 300 15.5 39.6 [46.6] 76.8 [79] 67 [69.2] 62 75.9 68.5

Pressure switch for energy-saving control ejector with N.O. type valve

Default setting The default settings are as follows [F 0] Unit selection function See page 24 Item Default setting SI unit fixed Unit conversion function kPa [F 1] Setting of OUT1 See page 25 Item Description Default setting Output mode Select the hysteresis mode. Hysteresis mode Reversed output Selects which type of switch output is used, normal or reversed.

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

SV

Power (Current: consumption: 0.6 W 25 mA, 24 VDC) A side manual override: Orange A side passage symbol: Orange Pull the valve up at the front.

High Power Cylinder:

2 1 n S n Mounting Basic Axial foot Front flange Rear flange B L F G Bore size 20mm 25mm 32mm 40mm 20 25 32 40 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Electric Actuator with Integrated Guide

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

HRS100/150

G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat

Refrigerated Air Dryer

IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110)