VQ4000

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) JEMANET (JPCN-1) Mitsubishi Electric Corp.: CC-LINK System Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System 1 to 16 stations Kit L Kit L BB C D F1 J1 J2 K Q R1 R2 U V G H 3 to18 stations SD S Simple specials are available with SMC Simple Special System.

HRX-OM-W002

For details, refer to 5.3.6 Alarm Setting Menu. ) ECO F RUN MPa ALM PSI WRN Flash LPM GPM M RUN RMT RUN MPa H ALM EXT WRN LPM SEC AT RMT H SEC MENU RUN/ MENU RUN/ STOP STOP After resetting the alarm, press and hold for approximately 1 second.

PROPORTIONAL VALVE. SOLENOID VALVE. 0.10600 lb. F47.

REC

Dimensions Basic style: RECB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H2 2-RcP Width across flats B2 Width across flats B1 2-NN G G H1 Standard port Pluged (M5 x 0.8) I 2-Eh8 D MM AL K A N N F lNA S + Stroke H F ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I

CS1

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261

15

(Table clearance is included.) 832 Motorless Type Electric Actuator/High Rigidity Slider Type Ball Screw Drive LEJS Series LEJS40, 63 How to Order q H NZ 40 500 e r t A w LEJS q Accuracy e Motor type w Size t Stroke [mm] r Lead [mm] 200 to 1500 Nil Basic type H High precision type 40 63 Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting

17

support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

IIIIIII

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

Mechanical Valves Series NVM, NVFM, NVZNI

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

Thermo-chiller/Rack Mount Type

to kW : (= r x qv x 60) [kgf/h] : 1 [kgf/L] : 10 [L/min] : 1.0 x 103 [cal/(kgfC)] : 20 [C] : 22 [C] : 2.0 [C] (= T2 T1) : 60 [min/h] : 860 [(cal/h)/W] *1 Refer to page 40 for the typical physical property value of tap water or other circulating fluids.

CG5-S

M5 x 0.8 F NN MM GA GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8

Thermo-chiller

[15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-A -20/40(50 Hz) HRS150-A -20/40(60 Hz) 18 18 16 16 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 14 14 Ambient temperature 90F (32C) 12 12 Ambient temperature 104F (40C) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient

HRS100/150

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Electrical Wiring Warning Caution HRS HRS150-A/W-20 Grounding should never be connected to a water line, gas line or lightning rod. HRS 090 4 h HRS 100/150 HRS 100/150 2 h Caution 1 h HRSH 090 4 min 6 min 10 min 14 min 20 min 30 min 1.

HRX-OM-X071

ECO F RUN MPa ALM PSI WRN LPM GPM Lighting up RUN MPa ALM M RMT WRN LPM H RUN EXT SEC RMT H AT SEC MENU RUN/ MENU RUN/ STOP STOP ENT Press and hold for approximately 1second.

Fieldbus System

inputs 16 inputs 16 inputs Open circuit detection No No Yes No No No Symbol Connector B C C1 D E F M12 connector (5 pins) 4 pcs.

70astamb1

Series MB1W Standard Type Basic style: (B) MM MM G VW 2-RcP G Cushion valve Port E D e D E Effective thread MB Effective thread 13 f h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.

mb1

Series MB1W Standard Type Basic style: (B) MM MM G VW 2-RcP G Cushion valve Port E D e D E Effective thread MB Effective thread 13 f h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

M8 connector Cable length For connector cable of M8 connector, refer to page 90. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 4 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting