• W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..
7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !
3 Port Solenoid Valve Direct Operated Poppet Type New New [Option] RoHS Vacuum applications 101.2 kPa 101.2 Power consumption 4 w 1 .8 w 4 w Standard type 1 .8 w (Existing product: 4.8 W) Energy-saving type (Existing product: 2 W) A single valve with various valve functions 54.5 (Universal porting type) N.C. valve N.O. valve etc.
(kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5
1 0 to Note1) 11 AREA A Position 1 [m] Note1) 1 0 to Note1) 12 AREA A Position 2 [m] Note1) 1 0 to Note1) 13 AREA B Position 1 [m] Note1) 1 0 to Note1) 14 AREA B Position 2 [m] Note1) 1 0 to Note1) 15 Unused 4 Step Data No. 2 (Step Data No. 1Note6) 0-15 Same as above.
Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure
Note 3) Lead wire tolerance 61 D-H7BAL(Example) 3 m 1 m Flexible specification 5 m Z Lead wires with connector indication Part No. of Lead Wires with Connectors Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m Model Lead wire length 0.5 m (Applicable for connector type only) 90 mm D-LC05 3 m 150 mm D-LC30 5 m 3 m D-LC50 5 m Contact Protection Boxes: CD-P11, CD-P12
Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in
Length per roll (m) Tubing material Symbol T Material Symbol TI Material Nylon Soft nylon Polyurethane Nylon Soft nylon Polyurethane Metric size Metric size Symbol 20 20 m (Standard) Length Inch size TS TU TIS TIU Color Nylon Symbol B Symbol B Color Black White Red Blue Yellow Green Clear Color Black Blue White Soft nylon Tubing size Inch size W BU W Size Size Metric size Symbol Symbol R
Applicable model HRS0 -A -20-T-R Rated flow (50/60 Hz) Note 1),2) L/min 10 (0.35 MPa) /14 (0.35 MPa) Maximum flow rate (50/60 Hz) L/min 17 / 20 Pump Maximum pump head (50/60 Hz) m 70 Output W 610 Recommended earth leakage breaker capacity A 15 Cooling capacity Note 3) W The cooling capacity reduces approximately 300 W from the value in the catalog Note 1) The capacity at Thermo-chiller outlet
1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN : Manufactured upon receipt of order.
M Replacement of filter element M Replacement of filter case M Replacement of sound absorbing material 2 steps 2 steps 3 steps e q q q w w w Filter case Filter element Silencer cover Sound absorbing material Transparent filter case allows visual check of the contamination. If there is dirt inside the case, it is possible to remove the case and clean it.
Series VXR21/22/23 Dimensions Normally Closed: VXR210/220/230 Normally Open: VXR212/222/232 Grommet: G Port size Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 59 60 60 Port size P Rc N Q L K J H F E A B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80
[Tightening torque: 0.90.1N m (0.670.07ftlb] 3 Attach brackets to the manifold bases. {when equipped with brackets} [Tightening torque: 0.90.1N m (0.670.07ftlb] Note) Manifold station additions can be made in units of 2 or 3 stations.
L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.
Altitude [m] 1. Max. ambient 2. Cooling capacity temp.
K 20 m roll 100 m reel Model TRB0604 TRB0806 TRB1075 TRB1209 M 6 8 10 12 Inner tubing O.D. (mm) Inner tubing I.D.
Function Symbol Specifications DC (1.0 W) AC Electrical entry Nil Standard type High pressure type (Metal seal, VQZ100 only) Light/Surge voltage suppressor (1.0 W) (1) K Electrical entry Symbol (0.5 W) Low wattage type G L LO M MO Y YO YZ YS No Y Grommet (DC specifications) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector
M L M 17 17 33.6 7.6 17 17 37 8.5 22 22 39.4 9.3 Union Tee: KFG2T Applicable tubing size (mm) O.D.