Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 6mm, Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 3 (Universal), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 05 (3/16"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 6mm, Sealant: None

Body Size: 2 (1/8, 1/4 Basis), Style: 3 (Universal), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 03 (5/32"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 3 (Universal), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 11 (3/8"), Sealant: S (Sealant)

Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Port Size: N02 (1/4 NPT), Applicable Tube OD: 07 (1/4"), Sealant: S (Sealant)

Body Size: 3 (3/8 Basis), Style: 3 (Universal), Control Method: 1 (Meter-in), Port Size: N02 (1/4 NPT), Applicable Tube OD: 07 (1/4"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 3 (Universal), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 09 (5/16"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 11 (3/8"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 03 (5/32"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 09 (5/16"), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N02 (1/4 NPT), Applicable Tube OD: 05 (3/16"), Sealant: S (Sealant)

Note) In old ZR series vacuum systems, there was 1 pilot valve gasket (dedicated for the ZR series) per every 3 solenoid valves.
In current ZR series vacuum systems, there is a gasket (solenoid valve accessory) for each solenoid valve.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)