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Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

DC12~24V 1. 2. 3. 4. 2 CE2 ()CEU2 CEU1 CEU5 0.1mm 2-1 CE2+CEU2 CEU2 CEU2 8 CE2+CEU1CEU5 3 CEU1CEU5 9 2-2 2-2-1 C E 2 B 40 100 Z N R 40 40mm ( mm ) H 50 50mm () 63 63mm 80 80mm J 100 100mm K (mm) 2 S 1 40 25850 25700 n n 50 25800 25650 63 25800 25650 80 25750 25600 100 25750 25600 (mm) 40 1200 950 50 1150 900 63 1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

Note2) ( ): Without sub-plate Note3) Model number for 5 port base mounted type without sub-plate is SYJA3 40. With Bracket Air operated valve part No. SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20

or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20

PBT Material 30 40 0.5 g Weight 30 6.5 (R) 2 4.5 1 16 4 11 745 ARM10F Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

{Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06 {Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure

AQ Elbow type Metric size 04 06 08 10 4 6 8 10 ASV AK Control type Meter-out Meter-in 0 1 VCHC Port size ASR ASQ U01 Uni Uni Uni U02 U03 1 8 1 4 3 8 With One-touch fitting 635

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F 63, 80, 100 Panel Specifications Air Fluid Panel nut 1.5 MPa Proof pressure 1 MPa Hexagon nut Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) (1) Ambient and fluid temperature 10 turns (8 turns) Number of needle rotations (2) Nylon, Soft nylon, Polyurethane Applicable tubing material Note 1) In the case of AS1001F

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Possible to use in vacuum or under low pressures Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation How to Order 04 4 5 1 VP3 A G 1 VP series 3 port solenoid valve CE-compliant Q CE-compliant Note) Nil Number of solenoids Single Note) Electrical entry: D/DL/DS/DZ only 1 Body size Thread type 1 4 6 8 1 2 1 2 Rc Nil G F 1 NPT N NPTF T Body ported 5 Body type Pilot

50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F 63, 80, 100 Panel Specifications Air Fluid Panel nut 1.5 MPa Proof pressure 1 MPa Hexagon nut Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) (1) Ambient and fluid temperature 10 turns (8 turns) Number of needle rotations (2) Nylon, Soft nylon, Polyurethane Applicable tubing material Note 1) In the case of AS1001F

Possible to use in vacuum or under low pressures External pilot type Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation 04 4 5 1 VP3 A G 1 SY SYJ Thread type Series VP 3 port solenoid valve Rc G NPT NPTF T N F Nil VK Number of solenoids VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

AN400-04 Conditions (With SGP (Stainless steel gas piping)) Direct piping Series CS1 Series MB, CA SGP10A x 1 m AS420-03 AN400-04 VQC4000 Tube x Length Speed controller Silencer 2-2-10 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.