Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: None, End Lock: N (None)
Size: 32, Bearing Type: L ( Ball Bushing Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: w/o Cable, Actuator Cable Length: w/o Cable, Controller Type for (LEC, JXC): 1N (LECP1, NPN, Programless Type)
Body Size: 20, Motor Size: Standard, Stroke: 10mm, Finger Option: Basic Type, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN)
Body Size: 40, Motor Size: Standard, Stroke: 30mm, Finger Option: Basic Type, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN)
Body Size: 20, Stroke: 48mm, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN)
Size: 6, Motor Size: Standard, Lead Screw Type, mm: J (LEPS6: 8; LEPS10: 10), Stroke: 50mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: None, Actuator Cable Length, m: No Cable, Controller Type - LEC, JXC: 1N (LECP1, Programless Type, NPN)
Series: 7000 (SY7000), Port Size: 1 (Standard), Thread Type: N (NPT)
Series: 9000 (SY9000), Port Size: 1 (Standard), Thread Type: N (NPT)
Series: 3000 (SY3000), Port Size: 1 (Standard), Thread Type: N (NPT)
Series: 5000 (SY5000), Port Size: 1 (Standard), Thread Type: N (NPT)
Body Size: 25, Type: R (Standard), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 50mm, Lock: None, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: None, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 1N (NPN Controller, LECP1, Programless Type)
Body Size: 8, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: J (Size 8: 8mm, Size 16: 10mm, Size 25: 16mm), Stroke: 75mm, Lock: None, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: None, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 1N (NPN Controller, LECP1, Programless Type)
Body Size: 8, Type: D (In-line Motor Type), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 75mm, Lock: None, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: None, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: 1N (NPN Controller, LECP1, Programless Type)
Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)