Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Default settings) Base mounted Solenoid Specifications Grommet (G), (H), L plug connector (L), M plug connector (M), DIN terminal (D), (Y), M8 connector (W) Symbol Electrical entry Internal pilot G, H, L, M, W D, Y 10-SYJ51 M 2 4 10-SYJ52 M 2 4 DC AC 50/60 Hz Coil rated voltage (V) 24, 12, 6, 5, 3 24, 12 2(A) 2(A) 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation Standard

CC-Link-E

I f t he secondary si de out put i s rel eased t o t he at m osphere, ai r w i l l keep com i ng out . H andl e w i t h care. I f t he pressure suppl y i s cut w hi l e pow er i s suppl i ed, t he bui l t i n sol enoi d val ve w i l l keep operat i ng and m ay m ake a buzzi ng noi se. Thi s m ay af f ect t he l i f e of t he sol enoi d val ve.

CRB2/CRBU2/CRB1

F = mg Mass m Movement I: Inertial moment Refer to page 100. Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .

Table of Contents

Right-hand auto switch will be used for actuators with 1 auto switch. 50 63 80 100 Mounting style B L Basic style Foot style Electrical entry/Lead wire length Refer to Table (1) below if only foot assembly is required separately. Nil Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m L Connector/Lead wire: 0.5 m Table (1): Foot Assembly Part No. C Connector/Lead wire: 3 m CL Unit part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Right-hand auto switch will be used for actuators with 1 auto switch. 50 63 80 100 Mounting style B L Basic style Foot style Electrical entry/Lead wire length Refer to Table (1) below if only foot assembly is required separately. Nil Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m L Connector/Lead wire: 0.5 m Table (1): Foot Assembly Part No. C Connector/Lead wire: 3 m CL Unit part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Right-hand auto switch will be used for actuators with 1 auto switch. 50 63 80 100 Mounting style B L Basic style Foot style Electrical entry/Lead wire length Refer to Table (1) below if only foot assembly is required separately. Nil Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m L Connector/Lead wire: 0.5 m Table (1): Foot Assembly Part No. C Connector/Lead wire: 3 m CL Unit part no.

Vacuum Unit

Length symbol Tension bolt assembly (2 pcs. per set) [L = 12.5 x M + 10.5] M: Length symbol 1 to 40 to 1 L = 23 40 L = 510.5 Exploded View e ZK2 TB1 A 05 to Applicable stations L 01 For 1 station manifold 1.25 P = 12.5 5.25 7.5 10 For 10 stations manifold 35 25 Port plug assembly Port plug assembly Exploded View t Exploded View r 5.5 (Purchasing order is available in units of 1 piece

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Table of Contents

Inch Size H (Hexagon width across flats) Connection thread NPT Effective area (mm2) Weight (g) A L M Applicable tubing O.D.

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L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dm l!:;;I~ '!I!

MXQ

MXQ6(L) 6 19 7 7 M2.5 x 6 12.5 M2.5 x 8 8 2.5 6 8.3 M5 x 0.8 M MXQ-AS6(L)-X11 15 26.5 MXQ-AS8(L) 5 19.5 B MXQ8(L) 7 22 7.5 8 14.6 9 3 7 9.8 MXQ-AS8(L)-X11 M3 x 8 M3 x 10 15 29.5 M6 x 1 F MXQ-AS8(L)-X12 25 39.5 E G MXQ-AS12(L) 5 23.5 MXQ12(L) M4 x 12 M4 x 12 M8 x 1 MXQ-AS12(L)-X11 9.5 29 11 12 18.5 14 4 10.5 12.7 15 33.5 C MXQ-AS12(L)-X12 25 43.5 MXQ-AS16(L) 5 24.5 Table mounting section

CXS

Compact Type: CXSJ Vertical Mounting l l Mounting orientation m m Max. speed (mm/s) Up to 200 Up to 400 Up to 600 Up to 800 All strokes Stroke (mm) 6 10 15 Selection graph (1) (2) (3) (4) 20 25 32 Horizontal Mounting l Mounting orientation m m Refer to the caution notes below.

CXS

l Mounting orientation m m Refer to the caution notes below.

REA/REB

(Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

REA/REB

(Example) A93 3 m L (Example) Y59BL 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !