HRX-OM-S004

HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Bottom ported drawing 27 4(A),

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-2 port 3, 5 port 5 45 35 5 1/2, 3/4, 1 1 port 3/4-2 port 3, 5 port 45 35 3-11-10 11 Conforming to ISO Standard Solenoid Valve (with M Connector) Series EVS1-01/1-02 (Size 1) (Size 2) VK VZ VF VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

mlu

depth 12 7 8 9 9 54 68 86 104 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 KA NE NF NI NJ NY H2 K MM MM1 NA

Hygienic Design Cylinder Series HY

8 Rc 1/8 Rc 1/4 Rc 1/4 G 1/8 G 1/8 G 1/4 G 1/4 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 20 20.5 22 24 25, 50, 100, 150, 200 SB Bore size PC PD PE PF QA QB RA RB RC RD RE RF SA 26 to 50 st TA TB TC TD UA UB UC UD PB 25 st or less 51 to 100 st Over 101 st 32 40 50 63 46.5 48 55 52.5 22.5 21 21 23.5 76.5 78 85 82.5 42.5 40.5 41.5 45 16 17 22 23 37.8 42.5 52 61 4.7 4.7 6.2 6.2 13 13 16 16 11 11 12.5 12

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

Rubber seal 5 Port Solenoid Valve Series SYJ5000

5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 38.1 23.3 3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2-2.6 (For

Electric Actuators

side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

Compact Cylinder with Lock Series CLQ

Standard type (through hole): CLQB50 LOCK Extension locking Rc 1/4 Rear cylinder port Rc 1/4 Front cylinder port 10.5 13 Approx. 41 47 M10 x 1.5 effective thread depth 15 86 20 19 50 64 22 11 1.6 Minimum lead wire bending radius 10 Dust cover (manual unlocking unit) 6.6 Auto switch D-A7, A8 4-13 Counter bore depth 9.5 Rc 1/8 unlocking port (unlocks when pressurized) 17 50 64 4-11 Flat washer

Fieldbus system Analog unit

number number 1 to 5 V 4 to 20 mA number number 0 to 10 V 0 to 5 V 0 to 20 mA 07FF 2047 5.25 21 07FF 2047 10.5 5.25 21 078E 1934 5 20 079E 1950 10 5 20 0400 1024 3 12 0400 1024 5.25 2.625 10.5 0072 114 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 Sign

HRX-OM-T002

HRX-OM-T002 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-R026

HRX-OM-R026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal Protective Equipment . 1-4 1.6 Emergency Measures.