Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 0 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 300 KN-R02-250:2.5 KN-R02-200:2 250 KN-R02-150:1.5 KNH-R02-150 200 KN-R02-100:1 150 KNH-R02-100

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of actuation b Cv VF 2 position VZS3150 1200

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CQ2

88 101 114 127 140 152 165 178 75 IN 45 75 106 16 25 86 115 129 144 158 173 187 202 216 100 OUT 60 101 141 32 131 173 193 214 235 256 277 297 318 471 576 152 IN 71 118 165 20 40 206 252 275 298 321 344 367 390 413 597 717 229 OUT 94 157 220 1139 50 405 441 477 514 550 586 622 659 951 369 IN 113 189 264 25 1213 1424 63 579 620 661 702 742 783 824 865 538 OUT 147 245 344 1064 1132 1200

REA/REB

to 60C Piston speed 70 to 600mm/s Lubrication Non-lube Stroke length tolerance 0 to 1.8mm Centralized piping Piping type Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Rc 1/8 M5 x 0.8 Piping port size Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) Number of axes 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

CV/MVGQ

Opening Range of Throttle Valve and Driving Speed Conditions: Operating pressure 0.5 MPa, Horizontal mounting, No load, Spring return side The speeds shown in the graph are for reference. 40 40 1400 50 50 1200 Piston speed (mm/s) Related things about auto switches and the mounting brackets part numbers are the same as these of Series CV3.

REA/REB

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) Number of axes MK(2) 10 500 150, 200, 300 150, 200, 300, 400, 500 15 750 1 axis RS Q G 200, 300, 400, 500, 600 20 1000 Made to Order Specifications (For details, refer to page 10-21-1.) 200, 300, 400, 500, 600, 800 25 RS H A 1200

C95

Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke 32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Made to Order Specifications (For details, refer to page 6-17-19.) 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50,

CP95

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Intermediate strokes are available.

MB

MB1 Standard Stroke Bore (mm) CA2 Standard stroke (mm) Max. stroke 32 CS1 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C76 Made to Order Specifications (For details, refer to 6-6-39.) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125,

70astamb1

25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175, 200, 250,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

101 45 88 75 63 IN 16 25 216 202 187 141 173 158 101 144 129 60 115 100 86 OUT 32 471 318 297 277 165 256 235 118 214 193 71 173 152 131 IN 576 20 40 597 413 390 367 220 344 321 157 298 275 94 252 229 206 OUT 717 50 951 659 622 586 264 550 514 189 477 441 113 405 369 IN 1139 25 63 1213 865 824 783 344 742 702 245 661 620 147 579 538 OUT 1424 80 2111 1539 1471 1404 422 1336 1268 302 1200

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Fluid fill, drain port, and filter access on the front; Color LCD screen with control pad for settings and diagnostics; RS-232C / RS-485 Communication functions; Cooling/Heating capacities (W): 1100/300, 1200/500, 1800/500, 2400/700, 3000/700, 5100/1200; Temperature stability: ±0.1°C; Power supply requirement: 200~230 VAC, 50/60Hz; Circulating Fluid: water or 15% ethylene glycol; Standards

Fluid fill, drain port, and filter access on the front; Color LCD screen with control pad for settings and diagnostics; RS-232C / RS-485 Communication functions; Cooling/Heating capacities (W): 1100/200, 1200/500, 1800/500, 2400/700, 3000/700, 5900/1200; Temperature stability: ±0.1°C; Power supply requirement: 200~230 VAC, 50/60Hz; Circulating Fluid: water or 15% ethylene glycol; Standards

Fluid fill, drain port, and filter access on the front; Color LCD screen with control pad for settings and diagnostics; RS-232C / RS-485 Communication functions; Cooling/Heating capacities (W): 1100/300, 1200/500, 1800/500, 2400/700, 3000/700, 5100/1200; Temperature stability: ±0.1°C; Power supply requirement: 200~230 VAC, 50/60Hz; Circulating Fluid: water or 15% ethylene glycol; Standards

Fluid fill, drain port, and filter access on the front; Color LCD screen with control pad for settings and diagnostics; RS-232C / RS-485 Communication functions; Cooling/Heating capacities (W): 1100/200, 1200/500, 1800/500, 2400/700, 3000/700, 5900/1200; Temperature stability: ±0.1°C; Power supply requirement: 200~230 VAC, 50/60Hz; Circulating Fluid: water or 15% ethylene glycol; Standards

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