Serial interface unit EX500 is capable of controlling up to 64 solenoids, and is compatible with SV1000/2000/3000/4000, VQC1000/2000/4000 valves. The EX500 makes it possible to connect up to 4 valve manifolds with up to 16 solenoids each.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves. 

This serial interface is compatible with series VQC1000/2000/4000 and SV1000/2000/3000 valves. Available protocols include DeviceNet, CC-Link, AS-i, Profibus-DP, and CANopen.

Delivery Pressure: L [15 to 2500 psig (0.1 to 17.2 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 40 [4000 psig (28 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,

Delivery Pressure: N [25 to 4000 psig (0.17 to 27.6 MPa)], Relieving: 1 (Self-relieving, Standard), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 0 (No Pressure Gauge), Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material:

Delivery Pressure: N [25 to 4000 psig (0.17 to 27.6 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: Q [10000 psig (70 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,

Delivery Pressure: N [25 to 4000 psig (0.17 to 27.6 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 0 (No Pressure Gauge), Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®, Standard

Delivery Pressure: N [25 to 4000 psig (0.17 to 27.6 MPa)], Relieving: 1 (Self-relieving, Standard), Material: B (Brass), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: VitonÂ

Delivery Pressure: N [25 to 4000 psig (0.17 to 27.6 MPa)], Relieving: 0 (Non-relieving), Material: S (316 SS), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®, Standard

Delivery Pressure: L [15 to 2500 psig (0.1 to 17.2 MPa)], Relieving: 0 (Non-relieving), Material: B (Brass), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 40 [4000 psig (28 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®, Standard

Delivery Pressure: L [15 to 2500 psig (0.1 to 17.2 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 40 [4000 psig (28 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,

Delivery Pressure: L [15 to 2500 psig (0.1 to 17.2 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 40 [4000 psig (28 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,

Delivery Pressure: N [25 to 4000 psig (0.17 to 27.6 MPa)], Relieving: 1 (Self-relieving, Standard), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 40 [4000 psig (28 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material

Electric Actuator/Slider Type

Positioning pin (Mounting reference plane) Model Distance LEFS25 H 4100 km LEFS25 A 2500 km LEFS25 B 1200 km Model Distance LEFS32 H 6000 km LEFS32 A 4000 km LEFS32 B 2000 km Positioning pin (Mounting reference plane) Positioning pin (Housing B bottom) Model Distance LEFS40 H 6000 km LEFS40 A 4000 km LEFS40 B 2000 km Body mounting reference plane Positioning pin The traveling parallelism

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

High Speed Pilot Operated

Manual Override DXT1215T 5W U 01 (-X1) Warning Cable length [mm] Symbol Cable length [mm] 1 300 2 500 3 1000 4 2000 5 3000 6 4000 7 5000 The manual override is used for switching the main valve regardless of the valves electric signal. As the connected actuator will start operating due to this manual operation, be sure to confirm that it is safe to do so beforehand.

99

Pre-rinsed with ultrapure water (0.2 m version only) Resistivity recovery characteristics Applicable fluids Filtration area: 4000 cm 2 [Measuring conditions] Element used: ED801S-X20 Element size: 70 x L247 Classification 0.2 m 0.4 m Fluid: Ultrapure water (resistivity value 17.9 Mcm) Flow rate: 10 L/min DI water (Deionized water), ultrapure water, ion-exchange water, distilled water Water

HAW

4000 5700 7000 HAW2 5 HAW7 5 HAW22 17 HAW37 25 Maintenance 7000 8600 10 34.5 36 37 40 44 46 38 40 42.5 43 49 54 36 Caution HAW55 1.

Thermo-chiller

When deionized (pure) water is used, the electric conductivity should be 0.5 S/cm or higher (Electric resistivity: 2 Mcm or lower). 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% to the capacity of the main breaker of this product) HRLE090 28 A HRLE Series Specific Product Precautions 4 Be sure to read this before handling the products.