VZS

from D side as the 1st one.

Membrane Air Dryer

D-DN

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

Stainless Steel 316

(In case of R) 8 20.9 21.6 45 25.9 27.4 15 1/4 14 24.9 L1 Applicable tubing 56 27.9 29.1 3/8 M 69 27.7 30.7 1/4 10 23 35.2 18 17 27.8 D 73 29.7 32.4 3/8 A 94 30.7 35.1 3/8 L2 12 24.8 50.2 20.8 31.3 H 121 34.7 37.2 22 1/2 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

SMC Pneumatic Clean Series

M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

Possible to transfer a workpiece at low-speed.

4 q w r y !5 !6 i w i !5 y q r 312 CRQ2X Series Low-Speed Compact Rotary Actuator Rack & Pinion Type Dimensions Size 10/15 3H9 effective depth 2 CRB2 TA 0.6 CRB1 30 MSU BU CRJ CRA1 2 x M5 x 0.8 through (Opposite side 7.6 counterbore depth 4.2) B CRQ2 MSQ With double shaft DD W D MSZ CRQ2X MSQX CRQ2X MSQX H 2 10 2 x M5 x 0.8 (Port) MRQ (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Digital Flow Switch

OUT2 2 [ 2_P] Normal output [ 250] 250 L/min (PFMC7501) [ P_2] Set value of OUT2 2 [ 500] 500 L/min (PFMC7102) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input

39

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

4/5 Port Air Operated Valve Series SYJA3000

P R 61.5 (DIN 62.8) A A A A A 30 R P R 21 21 SZ 83.7 [85.9] 84.5 [86.7] 21 60 SY B B B B B 1/4 (P, R port) SYJ (Pitch) P = 19 Manual override 23.5 SX (Station n) (Station 1) (Light/Surge voltage suppressor) + + + + + 58 [65] 42.6 26 B B 19 40 A A 1/8 (A, B port) 2 (Pitch) P = 19 23.5 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) Approx. 300 (Lead wire length

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12