Hand Valve Series VH

1 (P) 62 74 49 62 2 (A) 4-5.5 4-6.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94

HRL

, r Power supply: 400 VAC *4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 400 VAC, u Piping length: Shortest *5 With the pressure control mode by inverter.

I/O Configurator (NFC version)

R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).

Series AP3100

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

CXT

900 25 125 900 32 140 1100 40 170 1900 3.8-6 Platform Cylinder Series CXT Construction !

Platform Cylinder Series CXT

YES Model selected Without shock absorber Model selected With shock absorber 522 Series CXT Non-rotating Accuracy of Slide Block p y r CXTM CXTL (Slide bearing) (Ball bushing bearing) p (= y) r p (= y) r Bore size (mm) 12 0.09 0.12 0.05 0.05 16 0.08 0.10 0.05 0.04 Pitching direction Rolling direction Yawing direction 20 0.07 0.08 0.04 0.03 25 0.07 0.07 0.04 0.03 32 0.08

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Air Cylinder

3 r i !0 !6 o !1 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Qty. Note Kit no.

CM2

, 150 CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

30

M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148

Clamp Cylinder Series CK1

-125/CKP150-125 CKG163-125/CKP163-125 Auto Switch Mounting Bracket Assembly / Part No.

Air Cylinder NCM Series Stainless Steel Cylinders

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 mm stroke.

ZP

125 ZP125H 128 C 80 104 13-11-81 Series ZPT/ZPX Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

SMC Pneumatic Clean Series

, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1

SMC Pneumatic Clean Series

A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

Lubrication Equipment

AMR AWM How to Order AWD AL 23 80 12 0 R ITV AL800 Optional specification Flow direction: Right to left R VBA AL900 Lubricator Body size Port size Options VE 1 1S-1 1S-2 2 3 6 8 . When specifying more than one option, please list alphabetically.

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

NPT male Compression Connection Connection size (inch) 1/4, 3/8 Air Operated Type Fitting Status Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series AK3542 AK4542 N.C. 0.29 0.5 316 SS 125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page