XLA- ∗ -F7NJ ∗ - ∗ Series Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Auto switch mounting bracket For the auto switch D-F7NJ*, the mounting bracket XLA25-100 is used. 3.
Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.
R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 3.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.
Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.
400 DLateral load F [N] 300 300 -X 200 200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across
RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000
P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.
400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50
0oi q w e r t y u i !1 !2 No.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.
100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 Specifications Operating pressure 0 to 0.7MPa Proof pressure 1.05MPa Ambient and fluid temperature 5 to 50C Fluid Turbine oil (40 to 100cSt) Converter standard effective oil level stroke/effective volume (cm3) Nominal size (mm) Limited flow* (l/min) Standard effective oil level stroke (mm) 100 200 300 400 500 600 700 800 50 63
MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.
MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
LEFB16 LEFB25 LEFB32 Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700