5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Single Axis Electric Actuator Serriies LJ1S Slider Guide

W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.

LG1H

Nil W High rigidity direct acting guide H Axial F Cable entry direction Series Cable length Without coupling With coupling 20 21 2m 3m 4m 5m 2 3 4 5 Stroke Lead screw lead Motor specification 10mm 20mm A C Standard motor Matsushita Electric Industrial Co., Ltd.

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

MLGC

Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown

AC Servo Motor Driver (Pulse input type)

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

SMC Pneumatic Clean Series

Bore size (mm) Cushion valve Width across flats (mm) Socket wrench JISB4648 Hexagon spanner wrench 1.5 20, 25, 32, 40 1.5 snap ring 21 Series CM2W 10-/1121-/22Double acting, Double rod cylinder/ 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 H7B 21 C D M 2 W L 40 150 H7B Nil Built-in magnet Number of auto switches 2 pcs. 1 pc.

Thermo-con/Rack Mount Type

1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Digital Flow Switch (Remote type monitor unit)

thickness of the panel is 0.5 to 8 mm (with a waterproof seal: 0.5 to 6 mm) Dimensions of power supply/output lead wire (ZS-40-W) -72No.PF-OMN0012-H Revision history A: Add the product model.

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

OMR0032

[ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

12VDC Others 12 Series VQZ How To Order How To Order: VQZ200/300 Base Mounted Valve With Sub-plate Preferred Option Program VQZ 2 1 5 5 L 01T Series 2 3 VQZ200 Body width 15mm VQZ300 Body width18mm Port size (sub-plate) Symbol Port size VQZ200 VQZ300 Without sub-plate 1/8 NPTF 1/4 NPTF 3/8 NPTF 01T 02T 03T Symbol (A) 2 N.C. 1 IP65 Option (Y, YZ only) 1 (P) 3 (R) Metal seal Rubber seal W

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

10

Body material: AIuminum, C37, Stainless steel Body material: Resin q q w w e e r r t t y y IN OUT IN OUT u u Component Parts Component Parts No. Description No.

Digital Flow Switch (Remote type sensor unit)

Bracket cannot be mounted onto the 250 L/min type. Replacement part Element Part number Remarks Vinyl chloride piping tube (25 A) ZS-40-U25 25 A Vinyl chloride piping tube 1 pc.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 32 40 50 63 80 100 125 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

, 320, 400, 500 40 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 125 Intermediate strokes are available