Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 1.5m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 1.5m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: w/o Cable, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: PNP, I/O Cable Length: 3m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 1.5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 5mm; 25: 6mm; 32: 8mm, Stroke: 50mm
Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEY, Type: Rod Type, Body Size: 32, Bearing Type: None, Motor Mounting: Top Mounting Type, Lead: B (16: 5mm; 25: 6mm; 32, 40: 8mm), Stroke: 50mm
Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 32, Motor Mounting Position: Top Mounting Type, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm), Stroke: 50mm
Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: w/o Cable, Actuator Series: LEY (Rod Type), Size: 32, Motor Mounting Position: Top Mounting Type, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm), Stroke: 50mm
Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Actuator Series: LEY (Rod Type), Size: 32, Motor Mounting Position: Top Mounting Type, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm), Stroke: 50mm
Round Type Low Pressure Hydraulic Cylinder Series CHM Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.
Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.
R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6
Voltage to Operaie (on 60 cycles) DC 8090 B70h 13.2 13.2 OIRECT SOLEI{OIO OPERA'ED: The solenoid operates tho spool directly, and a spring returns the spool and solenoid plunger when the solenoid is de-enrgized RESFO SE Time to Energizq (Sconds) 0.018 0.017 o.ga 0.025 0.012 0.012 0.018 0.018 0.015 0.015 0.025 0.025 0.0r7 0.016 0.023 0.023 1r5/50 1n/@ 1 15/50 120r'@ The sOool has no seals,
L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
Refer to back page 50 for Safety Instructions, pages 17 to 19 for Fluids Control 2 Port Valves Precautions, and pages 467 to 470 for VDW Series/Specific Product Precautions. Selection Mounting Warning Warning 1.