Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

temperatures, excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

IZx-OMT0049

Handling Caution 1) Do not apply excessive external force or shock (100m/s2 or more) to the product Even if the there are no problems with the appearance of the controller, high voltage power supply module or bar, the damage of the internal components may cause malfunction. 2) When the bar length exceeds 820mm, hold the both ends and the middle of the bar so that moment load is not applied

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

3/8 9.3 0.43 2.6 2.0 2.4 JSXZ31-C Sm03 700 40 Brass, Stainless steel 1/2 15 23 0.34 6.0 4.6 5.3 JSXZ41-C Sm04 820 50 Brass, Stainless steel 3/4 20 36 0.26 9.4 7.8 9.2 JSXZ51-C Sm06 1200 60 Brass, Stainless steel 1 25 185 8.7 10.2 JSXZ61-C Sm10 1400 1.0 1 The flow rate characteristics of this product vary. 2 Indicates case of grommet type.

Peltier-type Chiller Thermo-con/ Compact Type

Heating Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 800 800 700 700 Heating capacity [W] Heating capacity [W] 600 600 Ambient temperature 35C Ambient temperature 35C 500 500 400 400 300 300 Ambient temperature 25C Ambient temperature 25C 200 200 100 100 0 0 10 20 30 40 50 60 70 Circulating fluid

Sine Cylinder Series REC

25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Arm length Shim Clamping position Bore Size: 25 Arm length: 100 mm 157 [700] Peak clamping force position 135 [600] Clamping force lbf [N] 112 [500] 90 [400] 116 psi [0.8 MPa] 67 [300] 0.5 MPa 73 psi [0.5 MPa] 45 [200] 22.5 [100] 0.3 MPa 44 psi [0.3 MPa] 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Shim thickness [mm] Bore Size: 32 Arm length: 100 mm 157 [700] 135 [600] Clamping force lbf [N] 0.5 MPa

Sine Cylinder Series REC

25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

MHx-OMZ0005

Nm JMHZ2-16D M3x0.5 0.59 17 - MOTOMAN-HC10 M6x12 6.3Nm 18 - M6x23 6.3 Nm M4x10 1.0Nm 19 - M8 M8 M8-MOLEX S1 S2 M4x8 1.0Nm 20 - (M4x6) (M4x6) 1.0Nm P175-2. M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

ML2B

Fix the adjusting bolt to around 0.5 mm projection from the shock absorber as shown below. m: Weight of impact object (kg) g : Gravitational acceleration (9.8 m/s2) RHC 2000 1500 Stroke adjusting unit MK(2) Note) The speed of the impact object is measured at the time of impact with the shock absorber.

Lubrication Equipment

How to Order G ALB 900 0 0 10 S1 AL Float switch (option) Booster Lube S1 S2 900 2 inch standard None 1b (Without oil ON) 1a (Without oil OFF) Operation control signal Body size Air pilot 100V AC 200V AC 220V AC 24V DC Other 0 1 2 4 5 9 Port size (Bypass lubrication adapter) 00 10 20 30 None Rc(PT)1 Rc(PT)2 3 inch flange Operation control 0 1 Air pilot Solenoid ALB900-00-11 1.17-20 ALB900

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

500, 600, 700, 800, 9001000, 1200, 1500, 1800, 2000248 to 20003,000o0.14850/20BeltLinear guide5 to 4090 or less (No condensation);4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%

rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 8.65314 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide