AZ1000

0.69 (17.5) Max. 5.0 (127.0) Max. 5.6 (142.2) (When selecting option code P) 1.5 (38.1) 2.25 (57.2) 2.00 (50.8) A 0.88 (22.4) Connections inch A (mm) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) FV4 MV4 FV6 MV6 TW6 3.70 (94.0) 4.70 (119.4) 2.96 (75.2) Flow Characteristics AZ1500 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) AZ1500 2000 to 3000

High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Fieldbus system (CC-Link compliant)

SY 3000, 5000, 7000, 9000 SYJ 3000, 5000, 7000 S0700 0700 VQZ 1000, 2000, 3000 Plug-in type Valve series Model No.

Fieldbus system (DeviceNet compliant)

SY 3000, 5000, 7000, 9000 SYJ 3000, 5000, 7000 S0700 0700 VQZ 1000, 2000, 3000 Plug-in type Valve series Model No.

Table of Contents

Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.

Low torque Metal seal type Rotary joint

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com New Concept Connector Type Manifold 1-2-1 2 New Concept Connector Type Manifold Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Product is CE compliant with standard part number.

Low Friction Cylinders Series MQ

Piston Note 3) speed H (High speed/ High frequency type) 5 to 3000 mm/s (Refer to page 1191.) 250 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa 150 cm3/min or less Total allowable leakage 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 800 cm3/min or less 2500 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa 1500 cm3/min or less Note 1) Value when

Low torque Metal seal type Rotary joint

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

Table of Contents

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

3.2 6.2 D-F7K Most sensitive position 8.5 D-Y7K 2.5 M2.5 x 4L 3.5 Slotted set screw SMC 6.2 33 2 3000 5 10.6 0.4 D-Y7K Most sensitive position 12.5 Amplifier unit D-RK 5 12.5 7.7 56 3000 2.6 OUT1 OUT2 READY TRIMMER SWITCH SMC 12 8.6 3.5 DIN rail (35 mm width) Supplied by customer.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Caution Lead Wire Connection Manifold/Plug-in Type 01F D-sub Connector Type 01C Circular Connector Series VFS2000/3000/4000/5000 Series VFS2000/3000/4000/5000 SJ Wire connection specifications Lead wire for both solenoid A and B sides in manifold are connected to connector terminal as COM specifications.

4/5 Port Solenoid Valve

How to mount on the same manifold is shown on the following pages. 10-SYJ3000, 10-SYJ300 Page 507 10-SYJ5000, 10-SYJ500 Page 529 10-SYJ7000, 10-SYJ700 Page 550 If 4 or 5 port valve is used as a 3 port valve Series 10-SY 3000/5000/7000 may be used as a N.C. or N.O. 3 port valve by plugging one of the A, B ports. Be sure not to plug the exhaust ports (R).

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

DOC1020530

Calculating Acceleration/deceleration conversion example using an actuator with 8 [mm] lead with an acceleration of 3000[mm/sec2]. Speed at a rated motor rotation of 3000rpm Accel.

Digital Gap Checker ( compatible)

or less ISA3-G (3000 to 1751) X+1500 Process X+1250 X+1000 (1750 to 1501) (1500 to 1251) (1250 to 1001) data ISA3-H 2500 or less (2500 to 1751) Distance type Level 6 Level 7 Level 8 Level 9 Weight ISA-F X+15 X+10 X+5 X (5 to 0) 5 (20 to 16) (15 to 11) (10 to 6) ISA3-G X+75 X+50 X+25 X Display (25 to 0) 25 (100 to 76) (75 to 51) (50 to 26) value ISA3-H X+150 X+100 X+50 X (50 to 0) 50 (200

Digital Flow Switches

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 3000 150 150 6000 6000 300 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 12000 600 600 13 For Water Digital Flow Switch Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.

Low torque Metal seal type Rotary joint Series MQR

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

Soft Start-up Valve AV2000/3000/4000/5000

Soft Start-up Valve A V2000/3000/4000/5000 New New Series AV5000 introduced!

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13