24

JMGP MGP MGP Operating Range MGPW [mm] Auto switch model Bore size 12 16 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 3.5 5 5 5 6 6 6 6.5 6 7 MGQ MGG D-A9/A9V 7 9 9 9 9.5 9.5 9.5 11 10.5 10.5 D-Z7/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA MGC MGF 7.5 7 6.5 6 7 8 9.5 10 MGZ D-P3DWA 5.5 6.5 6 6 6.5 6 7 D-P4DW 5 4 4 5 4 4 MGT *: Values which

Hygienic Design Cylinder Series HY

1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF G 1/8 G 1/8 G 1/4 G 1/4 G 3/8 G 1/2 TN NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 81 81 83 95 107 107 131 131 5 5 6 6.5 8 8 9.5 11.5 6 8 10 13 16 16 22 27 30 30 35.5 44 55 69 80 100 24 29 35.5 44 55 69 80 100 33 33 69 69 71 78 90 90 108 108 D-X Individual -X Technical data 857

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

With air cushion M5 x 0.8 Relief port (10-, 21-) Vacuum port (11-, 22-) Cushion needle (Width across flats 1.5) GC H2 GA WA GB WB 2 x P (Rc) Effective thread length FL Width across flats B2 45 Width across flats KA NN H1 Width across flats B1 I Eh8 NA D H F A AL K MM NA 1.5 ZZ + Stroke S + Stroke (mm) F 0 200.033 0 260.033 0 260.033 0 320.039 GC 13 13 13 16 I 6 6 6 6 K 28 33.5 37.5 46.5 MM

Plug-in/Plug Lead: Single Unit

For replacement parts, refer to page 2-6-43. 2-6-31 Base Mounted Series VQ5000 Kit (Connector) C 61.8 2-Rc 1/8 (Pilot EXH port) 29.5 29.5 12 21 47.5 PE R2 5 R1 3 1 P SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port 133 106 46.8 9 9 59.2 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port Manual override B 2 A 4 6 Indicator light B 2 A 4 A B SMC SMC SMC SMC SMC 5 A B B B B B

Modular Type Filter Regulator Series AW

to 40 AWD30, 40 AWD20 to 40 Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Z Note 6) Micro-mist separator regulator Body size 20 30 40 Thread type Nil N Note 1) Rc Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) NPT When more than one specification is required, indicate in alphanumeric order.

MGG

7 8 9 10 11 12 13 40 and larger are the same as number 6.

CNG

M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (178) 12 10 (12) 107 15 (16) 33 8 4 12

AIR FILTER

Port thread Port thread Rc Rc G G NPT AD27(-Z)-A NPT AD27-C(Z)-A AD27-A AD27-C-A External appearance drawing and part no. B B Semi-standard 6 Semi-standard 6C Part no. Part no. Port thread Port thread Rc Rc G G NPT AD27-6(Z)-A NPT AD27-6C(Z)-A AD27-6-A AD27-6C-A M50.8 M50.8 12 Note 2 Option Semi-standard Semi-standard 2 Part no.

MB

(Refer to page 6-6-6.)

Cylinder with Lock

Rc MWB32-UA Bore size [mm] Hexagon wrench size of the lock holding bolt 32 NPT MWB32TN-UA 32 3 40, 50 5 63 6 80 8 100 10 G MWB32TF-UA Rc MWB40-UA 40 NPT MWB40TN-UA G MWB40TF-UA Rc MWB50-UA 50 NPT MWB50TN-UA G MWB50TF-UA Rod end nut Rc MWB63-UA 63 NPT MWB63TN-UA G MWB63TF-UA Rc MWB80-UA 80 NPT MWB80TN-UA G MWB80TF-UA Rc MWB100-UA Lock unit holding bolt 100 NPT MWB100TN-UA G MWB100TF-UA 3)

CNG

7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

FILTER REGULATOR

Port thread Rc Rc AD27-C-A AD27-A G G External NPT AD27(-Z)-A NPT AD27-C(Z)-A appearance B B drawing and Semi-standard 6 Semi-standard 6C part no. Port thread Part no. Part no. Port thread Rc Rc AD27-6-A AD27-6C-A G G NPT AD27-6(Z)-A NPT AD27-6C(Z)-A M50.8 M50.8 12 Option Note2 Semi-standard Semi-standard 2 Part no.

IDU/IDF

IDF-TR1500-7 IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Part No.

70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 to 20 stations per 1 station: 18 SY 2 stations: 86 C4(4) C6(6) M5(M5 thread) VQZ2l20 VQZ2l21 addition Rc(PT) 1/8 Top VQZ2000 2 to 20 stations SYJ VV5QZ22lll per 1 station: 26 SX 2 stations: 181 C6(6) C8(8) C10(10) Rc(PT)1/4 VQZ3l20 VQZ3l21 addition Rc(PT) 1/4 Top VQZ3000 2 to 20 stations VK VV5QZ32lll per 1 station: 53 VZ VF VFR VP7 How to Order Manifold Assembly (Example) VP4 VQ VQZ21205MC6

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 47.5 2(A) 2(A) 13.5 Rc 3/8 (A port) Stations L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 10 359 344 9 326 311 8 293 278 7 260 245 6 227 212 5 194 179 4 161 146 3 128 113 2 95 80 : With light/surge voltage suppressor ( ): Dimensions for external pilot Individual exhaust: VV3P5-42Stations 3-03 28.5 3(R) 3(R) Rc 3/8 (G) (E) (T) (D, Y) (R port) N.C. N.O.

LVQ

6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Large Size Vacuum Module: Series ZR

Both sides Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 station only 1 1 1 station only Thread type 6 stations only All stations A 6 Nil F G Note) Rc 6 6 stations only A All stations T NPTF When the spacers are attached to the specified locations, specify all spacers.

Micro Mechanical Valve Series VM1000

T.T. 40 OFF M5 x 0.8 39 (Pilot exhaust port) 38 Max. 6 21 30.5 1.5 1.5 VM VM Symbol (B) 2 (A) 4 18.5 3 VMG 12 14 3 (EB) 1 (P) 5 (EA) VR PE EA P EB (163.7) (133.2) VR51 20.4 32.2 20.4 32.2 114.7 20.4 22 20.4 A VHK B 42.4 VH VHS 23 4 2 5.5 40 28 3 x 4.5 mounting hole 5 x Rc 1 4 0.5 MPa supply VHS T.T. 26 N F.O.F.

CG1

6 !7 !8 !