CHKD/CHKG

+ Stroke CHA Related Products F with effective thread depth G DC H 2 x K through 4 x L counter bore M 4 x CD LW D LH LT B + Stroke X1 X1 E LX BB Y1 SS Z + Stroke LA + Stroke 32 to 100 (mm) Bore size (mm) LA B BB C F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5 depth 5.4 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 76 14 12 18 M10 x 1.5 12 6 5.5 26 15 64

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.8 3.5 24 30 M3 x 0.5 21 3 29 36 48 18.5 CDRBU2W20-D 42 34.5 30 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 25 25.5 34.5 CDRBU2W30-D 50 47.5 31 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 25 11-3-13 48 Series CRBU2 Dimensions: 40 (With auto switch unit) Single vane type/Double vane type CDRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l b (h9) Model 52 64

Slide Unit Series CX2/CXWM/CXWL

depth 5.5 2 x M10 x 1.0 Adjusting bolt 2 x M5 x 0.8 hexagon socket head cap plug (Cylinder port) 2 x M5 x 0.8 Hexagon socket head cap plug 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 End lock mechanism 4 x M6 x 1.0 thread depth 9 (6H7 hole pitch) Thread depth 4 4 positions for set screws for fixing shock absorbers 6H7 depth 8 +0.012 0 2 x RB1006X552 Shock absorber (mm) F 34.5 L 64

Table of Contents

34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22 50 47.5 31 M5 x 0.8 5.5 M5 x 0.8 25 11-3-13 48 Series CRBU2 Dimensions: 40 (With auto switch unit) Single vane type/Double vane type CDRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l b (h9) Model 52 64

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22 50 47.5 31 M5 x 0.8 5.5 M5 x 0.8 25 11-3-13 48 Series CRBU2 Dimensions: 40 (With auto switch unit) Single vane type/Double vane type CDRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l b (h9) Model 52 64

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications

C76

Rod Boot (mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com X (Hexagon socket head cap screw) F (Through-hole) CX V (Opposite side: Same) (L) (Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64

CXWM/CXWL

2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 4-5.5 through 4-9.5 counterbore depth 5.5 2-RB1006-X552 (Shock absorber) (mm) ZZ 184 234 284 334 384 434 484 Z 156 206 256 306 356 406 456 S SS 104 129 154 179 204 229 254 Q 170 220 270 320 370 420 470 F L P 35 60 75 90 90 90 90 Model CXWM20-50 CXWM20-75 CXWM20-100 CXWM20-125 CXWM20-150 CXWM20-175 CXWM20-200 52 77 102 127 152 177 202 64

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

20.0 90 58.0 8.6 160 12.0 12.0 54 18.0 M6 x 1 2 12 38 138 14.0 M6 x 1 27.0 134 68.0 11.0 220 22.0 16.5 84 20.5 M8 x 1.25 3 16 60 178 17.0 M8 x 1.25 31.0 NE NG NH NW PA PB PC PD PF Q QW T TT UU YW Z P PE PG Model MY3B16 MY3B25 MY3B40 MY3B63 M5 0.8 4.0 122 42 30 6.5 7 19 114 4.0 32.5 26 44 43 17.2 8 22.5 9.7 8.5 Rc,NPT,G1/8 Rc,NPT,G1/4 Rc,NPT,G3/8 6.0 178 62 47 9.0 10 30 166 6.0 47.5 40 64

Fieldbus system EtherNet/IP compatible SI Unit

Value Setting range 0 Based on the automatic setting (device minimum cycle time). 1 to 3 0.4 ms 4 to 63 0.4 ms to 6.3 ms (by 0.1 ms) 64 to 127 6.4 ms to 31.6 ms (by 0.4 ms) 128 to 191 32.0 ms to 132.8 ms (by 1.6 ms) 192 to 255 132.8 ms Values are calculated based on the following calculation.

EXxx-OMU0020CN

Y . 64 10.3. (M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

Fieldbus system IO-Link Setting tool

EX9-ZSW-LDT1 Minimum System Requirements Components Requirements Operating system Windows10 (32-and 64-bit) Memory 2GB Free hard disk space 150MB Processor 1GHz or higher,32-bit(x86) or 64-bit(x64) Screen resolution 800 600 pixels Recommended System Requirements Components Requirements Operating system Windows10 (32-and 64-bit) Memory 8GB Free hard disk space 250MB Processor 1GHz or higher

HRX-OM-Z002

HRLE090-W-Approx. 20 Installation environment specifications Sound noise HRLE050-A-2062/64 dB(A) HRLE050-W-2062/64 dB(A) HRLE090-A-2065 dB(A) HRLE090-A-4067 dB(A) HRLE090-W-20/4065 dB(A) * 1 m from the front surface, 1 m high from the floor, rated condition. 3.2 Installation HRLE Series 3-6 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.2.3 Installation and maintenance space It is recommended

HRX-OM-W002

61/64 Dimensions 10 mm W483xD550xH310 W483xD550xH399 Accessory20 Power supply connector,Maintenance handle for particle filter20, Operation manual,Particle filter element20 Weight 11 kg 40 41 45 HRR Series 9.1 Specifications 9-3 HRX-OM-W002 Chapter 9 Documents 1: Use the product in conditions where freezing will not occur.

LEH_C

32 32 32 32 64 PNP PNP 1P 1P 80 40 40 40 40 80 AN LECPA ( AN LECPA NPN NPN AP AP PNP PNP (m) () 8 8 8 8 L L 1.5 1 1.5 1 A A 10 10 3 3 3 3 B B 15 15 5 5 5 C C 20 20 5 () () R R S S / P.42 7.3 <> (NPNPNP) LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V)

SFOD-OMT0005CN

AddressJXC93IP Address (4)Assembly Instance Decimal Comm Format "Data-SINT" Input 100 Output 150 Configuration 105 (5)Size Decimal Comm Format "Data-SINT" Input 36[bytes] Output 36[bytes] Configuration 0[bytes] (4)(5) (1) (2) (3) -21- 4.4 EtherNet/IP SMC Step Data Object(Class 67h) Instance Attribute Access Size Name Value(Word) 1 100 Get/Set 32 STEP No.0 () () 1() 1() 2() 2() () () 64

Programless controller Step motor (servo 24 VDC)

Initial setting value per electric actuator . 53 10.1 Initial setting value of LEF series . 53 10.2 Initial setting value of LEH series . 56 10.3 Initial setting value of LESLESH series . 59 10.4 Initial setting value of LEYLEYG series . 61 10.5 Initial setting value of LER series . 64 10.6 Initial setting value of LEPYLEPS series . 65 10.7 Initial setting value of LEL series . 66 10.8 Initial