ISA2

Terminal box Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular construction Modular construction Requires less man hours to wire.

PSE530/200

Key lock Lock/Unlock selection SET SET Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Measuring mode Measuring mode Press and hold for 4 seconds or longer.

NCA1

NCA1-325 NCA1-800 NCA1-1000 CD 3/4 1 1 3/8 Part No. NCDP-325 NCDP-800 NCDP-1000 CD 3/4 1 1 3/8 DD .140 .140 .173 CL 3.10 3.60 4.66 Note: Retainer rings are included. Note: Cotter pins are included. Rod Jam Nut Rod Eye 2xCD CB ER CD Thread CD F CA H C A KK Dimensions Dimensions Thread 3/4-16UNF 1-14UNF 1 1/4-12UNF Part No.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

18 38 13 26 10 16 7 6 51 21 68 12 8 41 5 8 30 5 M8 x 1.25 13 26 15.5 23 f8 25 to 800 22 44 17 32 12 16 7 9 53 27 70 12 8 46 6 8 32 5.5 M10 x 1.25 13 28 19.5 25 f8 32 to 800 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 31 f8 40 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 34 f8 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

MGC

MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Set "0" to return data in less than 800 s or "1" to return data in 800 s or longer. [Pr. PC21] RS-422 communication response delay time 0: Disabled 1: Enabled (responding after 800 s or longer delay time) (3) Station No. setting Set the station No. of the driver to [Pr. PC20]. The setting range is station No. 0 to 31. 14 6 14.

MRHQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc. D20Sizes 10 and 16 updated!

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ115-M VQ110-L 4-14-19 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-14-20

ZSE F/ISE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Helium leakage test Helium leakage test is conducted on the welding parts.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY on ti rp so on ad a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Ejector Valve Unit Series ZYY/ZYX 1

ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP Precautions ZCU Be sure to read before handling.

Refrigerated Air Dryer

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Decreased up to the Power consumption max. 40% HFC134a Coefficient of destruction for ozone is zero.

MU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A significant reduction in thickness has been achieved through the adoption of the elliptical piston design, enabling the cylinder to be installed in a smaller space (In-house comparison).

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

3 Port Solenoid Valve Metal Seal Series VZ200 1

(VZ415) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Replacement Parts Description NBR Stainless steel Material Part no.

Step Motor Controller

Specifications Item Specifications Compatible motor Unipolar connection type 2-phase HB step motor Power voltage: 24 VDC 10% Current consumption: 3 A (Peak 5 A) Note 2) [Including motor drive power, control power, stop, lock release] Power supply Note 1) Parallel input Parallel output 11 inputs (Photo-coupler isolation) 13 outputs (Photo-coupler isolation) A/B phase, Line receiver input Resolution 800

Air Cylinder Series MB

500, 600, 700, 800 Oversized rod cylinder XB5 125 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (150C) XB6 Intermediate strokes are available.

Series KV2 Fittings

100/800 100/800 100/1000 100/800 100/600 100/400 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/200 100/200 50/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

REA/REB

Speed 600 mm/s Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) Symbol 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 High Precision Guide Type REBH Order Made