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From Table 3.7: At 1soo, 10 m3 of air can hold a maximum of 13.04g/m..10m" = 130.4 g P N E U A T I c T E c H t t o L o G Y At 650/o r.h. the air will conlain 130.4 g '0.65 = 84.9 g {a) The reduced volume ol compressed air at 6 bar pressur can be calculated: pl'v1 = pzvz = p; v1 = v2 = +H# '10 m3 = 1.44 mc From Table 3.7 1.44m3of air at 25oC can hold a maximum of 23'76 g '1 '44 = 34.2 g (

1000st 900st 1.5 800st 700st 1 600st st: Stroke (mm) 400st 500st 0.5 100st 200st 300st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM 100Stroke 4 (Slide bearing type) 3.5 3 Deflection Y (mm) 1300st 2.5 1200st 1100st 2 1000st 1.5 900st 800st 1 600st 700st st: Stroke (mm) 500st 0.5 400st 100st 200st 300st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 ! www.stevenengineering.com I

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard specifications: 5 m Option: 2, 10, 20, 40, 70, 100 m Filtration IR Polycarbonate Bowl material 180 Bowl capacity (cm3) VEX 5.45 3.15 Weight (kg) Bowl guard Accessory (Standard) AMR Accessory (Option)/Part No. ITV Part no.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Model IR AU100 AU200 AU300 Model VEX 4 1 8 3 , 8 1 4 1 Port size 950 1,450 1,600 Weight (g) AMR Standard Bowl guard ITV B31P B32P B32P AD32 G46-10-01 AD32 Bracket Accessory Option Float type auto-drain IC Note) Pressure guage with limit indicator Relieving

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Error of scale 0.05 MPa ZSP Repeatability 0.05 MPa Contacts 1a ISA2 Wiring specifications Grommet, Lead wire length 0.5 m (Standard) IS Fluid Air Ambient and fluid temperature 5 to 60C (No freezing) ZSM Port size R 1/8 PF2 Weight 74 g Switch Characteristics

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Fluid Proof pressure Max. operating pressure Pressure adjustment range Ambient and fluid temperature Contacts Error of scale Air/Inert gas 1.0 MPa 0.8 MPa 0.1 to 0.7 MPa 5 to 60C (No freezing) 1ab 0.1 MPa Wide calibration range 0.1 to 0.7 MPa ISA2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Small, lightweight electronic pressure switch Extremely compact (1/3 size as compared to Series ZSE2) 13W x 10H x 30L (mm) 2-wire type Applicable to either NPN or PNP output.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 > 4 = 2 = ? @) 6 ( : # # 1<' = & $ # "" !

position) 59 62 94 80.5 139 14 12 4-Rc1/8 (pilot pressure exhaust port) PA PB P R2 R1 67 40 (41.5) 38 (27) 6-Rc1/2, 3/4 1 5 3 SMC 32 (35) 32 (35) 35 35 L: Dimensions Fomula L n 10 9 8 7 6 5 4 3 2 1 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n +1 06 L1 624 568 512 456 400 344 288 232 176 120 Rc1/2 L2 640 584 528 472 416 360 304 248 192 136 L1 650

From Table 3.7: At 1soo, 10 m3 of air can hold a maximum of 13.04g/m..10m" = 130.4 g P N E U A T I c T E c H t t o L o G Y At 650/o r.h. the air will conlain 130.4 g '0.65 = 84.9 g {a) The reduced volume ol compressed air at 6 bar pressur can be calculated: pl'v1 = pzvz = p; v1 = v2 = +H# '10 m3 = 1.44 mc From Table 3.7 1.44m3of air at 25oC can hold a maximum of 23'76 g '1 '44 = 34.2 g (b

Size: 40, Motor Mounting Position: D (In-line), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange, Top Mounting & In-line), Actuator Cable Type, Length: R5 (5m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

(High-precision Type), Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Option, Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R5

Motor Mounting Position: R (Basic Type), Lead: K (8mm), Stroke: 100mm, Motor Option: B (w/Lock), Body Option: w/o Option, Mounting: w/o Side Holder, Actuator Cable Type, Length: R5 (5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable, 1.5m)

Series: LEKFS, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R5 (5), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)

Accuracy: Basic, Body Size: 25, Motor Mounting Position: In-line, Motor Type: G (High Performance, Battery-less Absolute), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 350mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (with, Includes 1 mounting Bracket), Grease Application: With, Positioning Pin Hole: K (Body Bottom 2 Locations), Actuator Cable Type, Length: R5

Accuracy: Basic, Body Size: 25, Motor Mounting Position: In-line, Motor Type: G (High Performance, Battery-less Absolute), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 400mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (with, Includes 1 mounting Bracket), Grease Application: With, Positioning Pin Hole: K (Body Bottom 2 Locations), Actuator Cable Type, Length: R5