Precautions 1

Double acting, Single rod Action 20, 25, 32, 40 Bore size (mm) 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure Rubber bumper Cushion Built-in One-touch fitting Piping 20 25 32 40 Piston speed (mm/s) 50 to 700 50 to 650 50 to 590 50 to 420 Application/Tubing O.D.

CLQ

If it is long, this may cause unlocking malfunction and reduce the lock's service life, etc. 50 50 Load weight kg Load weight kg 100 100 80 80 10 10 63 63 5 5 50 50 40 40 32 32 1 1 0.5MPa 0.4MPa 0.5MPa 0.4MPa 25 25 0.5 0.5 20 20 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Extension locking, Rubber bumper Retraction locking, Rubber bumper W 200 200 100 100 B 50 A 50 A 100 100 Load

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

12.8 S 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S ZPR F-0-B8 (Without buffer/Female thread) 40 50 20 to 32 12.8 26.2 S Hexagon width across flats 12 N 8 R F Applicable tubing O.D.Q E D C Y 2.5 A B Dimensions (mm) A B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by Tubing Diameter (mm) Q: 6

Electric Actuator Miniature Rod Type Miniature Slide table Type

ALARM JOG SETTING Step No. 0 Posn 20.00mm Select Posn Speed 100 mm/s Press the (1)Number key10 Press the (3)SET key Complete Change of Speed Step 1 Step No. 0 Posn 10 .00mm Speed 50 mm/s Speed 100 50mm/s Press the (4)Down key AX IS. Select Speed Step 1 AX IS.

Compact

(220N) 50N{90N} 50N(160N) 50N(70N) l\rax. speed 30mm/s 80mm/s 30mm/s 80mm/s Positioning repeatability r 0.03mm r 0.03mm Min. lead ' Half step 0.0o5mm 0.0125mm 0.002mm 0.O05mm Full sbp 0.01mm 0.025mm 0.004mm 0.01mm * Wflh one puls inpul Construction tlccFic lcluilon fiffn$dld Greater than 50% duty cycle?

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

Air Slide Table

Auto switches are shipped together, (but not assembled). 1 Series MXQR Specifications 6 8 12 16 20 25 Bore size (mm) Piping port size M5 x 0.8 Rc1/8, NPT1/8, G1/8 Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure 1.05 MPa Proof pressure 10 to 60C Ambient and fluid temperature 50 to 500 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) (Adjuster option/Shock absorber: 300

Plate Cylinder

Series MU 500 MU63 300 MU50 200 MU40 MU32 100 MU25 50 Load weight (kg) 30 20 10 5 3 2 1 0.5 100 1000 50 500 200 300 Maximum speed (mm/s) Front matter 1 Plate Cylinder: Double Acting, Single Rod 25, 32, 40, 50, 63 Series MU How to Order B 25 D 30 M Z MU B 25 D 30 Z M S M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Vacuum Pad

59 66.5 14.3 15.1 15.5 16.6 42.5 50 59 66.5 14.3 15.1 15.5 16.6 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

59 66.5 14.3 15.1 15.5 16.6 42.5 50 59 66.5 14.3 15.1 15.5 16.6 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

59 66.5 14.3 15.1 15.5 16.6 42.5 50 59 66.5 14.3 15.1 15.5 16.6 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

OMR0031

50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel distance [mm] Total travel distance [mm] 36 - (2) Speed entry method Settings: Target position [mm], Speed [mm/s], Acceleration [mm/s2], Deceleration [mm/s2], Load mass [g] To obtain the total travel distance S [mm] in absolute Acceleration Aa Speed Vc Speed [mm/s] positioning

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50 to 700 mm/s 50 to 1000 mm/s Piston speed Basic cylinder Rubber bumper Cushion Built-in shock absorbers (2 pcs.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

12.8 S Dimensions by tube diameter 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 20 to 32 12.8 26.2 ZPR 40/50 F-0-B8 (Without Buffer/Female Thread) S Width across flats 12 N 8 R F Applicable tube O.D.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

"S" option is not available.

13

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Rotary Actuator/Vane Style Series CRB2

Mass (g) DVane type Single vane Double vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-D CRB2BW10-S Model 90 180 180 90 100 90 270 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 400 446 387 365 25.7 49 376 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

Short Stroke Electric Actuator Series LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 50 50 2.1 1.1 0.3 0.1 2.1 1.1 0.3 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 0.6 0.2 0.1 1.1 0.6 0.2 0.1 200 200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3