CL

4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 30 35 35 40 40 50 50 56 6.5 6.0 6.0 8.0 8.0 43 43 43 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 27 32 32 37 37 47 47 53 14 14 14 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 15 17 17 21 21 16 16 18.5 32 40 40 52 52 22 27 27 32 41

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

[mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VA VD WA WB WH ZZ Without rod boot With rod boot 32 Up to 1000 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6 x 1 8 10 4 4 4 7 26 146 40 Up to 1900 Up to 1000 24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105 4 6.5 14 38 M6 x 1 8 13 4 4 5 8.9 30 163 50 Up to 1900 Up to 1000 32 40 16 20 66 G 1/4 32 69 M16 x 1.5

Table of Contents

) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse

Proposals for Energy Saving

211 15 12 1 40 Rc 1 106 197 4-Long hole 9 View A 54 10.5 283 383 243 39 8.5 8.5 25 25 50 50 39 72 118 R9.5 R9.5 144 182 61 1 .5 1 9 View A CS1LH200-Q3496-130 Intensified pressure ratio 1 : 25 Oil discharge volume: 131cm 2-Rc 3/4 18.5 18.5 4-M20 x 1 .5 4-M12 x 1 .5 Approx. 272.5 245 132 Rc 1/2 424 10 63 39 241 361 229 14 30 60 39 60 30 85 150 182 226 574 25 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\

AC

Component AR IR Applicable Model Model AR2500 AR3000 AR4000 AR4000-06 AR5000 AR6000 VEX 4 1 4 1 8 3 4 1 8 3 4 3 4 3 2 1 1 1 Port size AW 8 3 AMR How to Order How to Order AWM AR 00 30 BG X430 03 AR 00 30 BG X470 03 3 3 AWD For low/high temperature environment ITV Body size Body size External parts metal 4 1 4 1 8 1 25 30 40 50 60 20 25 30 40 50 X430 X440 Low temp. High temp.

MXS

, #3 SMXS6, #1(#1+#5) (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 MXS6-10 MXS6-20 MXS6-30 MXS6-40 MXS6-50 SMXS6N, #4(#1+#4) SMXS6N, #5(#2+#5) SMXS6N, #6(#3+#6+#7) SMXS6, #2(#1+#2+#5) 3.11-12

CG1

47 55 16 8 94 19 39 52.4 1/8 27 10 14 26 37 30 30 6 32 135 M14 X 1.5 50 Up to 300 17 30 58 62 20 11 108 27 45 64.5 1/4 32 12 18 44 32 35 33 7 41 155 M18 X 1.5 63 Up to 300 19 32 72 64 20 11 114 27 45 76.6 1/4 32 12 18 38 50 35 39 7 46 161 M18 X 1.5 With air cushion (mm) Bore (mm) Stroke range (mm) W P WA WB WC WD WH WH2 30 30 25 20 20 20 20 25 32 40 50 63 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1

Electric Slide Tables

0.5 10 to 200 4 Series LECP6 LES8 30, 50, 75 Basic type/ R Type 1 0.25 20 to 400 8 3 3 10 to 200 5 Step motor (Servo/24 VDC) 30, 50 75, 100 Series LECP1 LES16 3 1.5 20 to 400 10 5 5 10 to 200 8 30, 50, 75 100, 125, 150 Series LECPA LES25 Symmetrical type/L Type 5 2.5 20 to 400 16 Page 1 30, 50, 75 1 1 4 10 to 200 LES8A 1 0.5 8 20 to 400 3 3 5 10 to 200 Servo motor (24 VDC) 30, 50 75, 100

Air Slide Table Series MXS

(Define 1 =0.) Wa = 1 x 1 x 4 = 4 K = 1 = 1 Wmax = 4 1 = 1/4 = 0.25 1 = W/Wa Find the load factor of the load mass 1. 3-2 Load Factor of Static Moment Rolling Yawing M = W x 9.8 (Ln + An)/1000 Correction value of moment center position distance An: Table (3) Find the static moment M (Nm). Examine Mr. Mr = 1 x 9.8 (30 + 10)/1000 = 0.39 A6 = 10 Examine My.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 CRA1L63-Y-1 M10 x 1.5 x 40 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

Tie-rod Type Hydraulic Cylinder

(same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs. (different surfaces/same surface) 55 50 10 60 50 65 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9V 50 + 30 65 + 30 10 + 30 50 + 30 55 + 30 60 + 30 "n" pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(The dimensions are marked .) 8-29-29 30 Series CXSW Dimensions; 25, 32 CXSW25 ZZ SS 12 S 12 12 12 30 (30) Z 6 30 2-R3.5 2-M8 x 1.25 x 6l (Hexagon socket head set screw) 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 80 64 35 6.3 5 2-R3.5 2-6.9 through 2-11 counterbore depth 6.3 8 12 14 4-M6 x 1 (Through-hole) 4-M5 x 0.8 thread depth 7.5 2-M6 x 1 x 18.5l, 2-M6 x 1 (Hexagon bolt) (Hexagon nut) 2-M6

Series AP500

seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld 1 inch face seal (Female) 1 inch face seal (Male) 1 inch tube weld Code -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 400 psig V3 L 1 H 4 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 3 MPa FV8 MV8 TW8 FV12 MV12 TW12 FV16

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

13 G 1/8 4 12 15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320 51 15 17

Refrigerated Air Dryers

[C] Correction factor 2 to 25 1.14 30 1.04 32 1 35 0.96 40 0.9 Ambient temp. [C] Correction factor 2 to 25 1.06 30 1.02 32 1 35 0.99 40 0.98 45 0.92 Ambient temp. [C] Correction factor 2 to 25 1.10 30 1.05 32 1 35 0.95 40 0.90 Ambient temp. [C] Correction factor 2 to 25 1.2 30 1.04 32 1 35 0.93 40 0.84 Ambient temp.

Cylinder with Lock Series CLS

M J MM GC BD BG BE MB MA 125 140 160 180 200 250 19 31 50 47 145 75 18 110 136 1/4 115 36 90 59 43 14 16 107 58 110 M14 x 1.5 15 M30 x 1.5 35 1/2 25 to 1000 3 19 47 78 14 15 31 35 50 161 18 30 110 146 1/4 128 36 90 59 43 16 114 64 110 M14 x 1.5 M30 x 1.5 1/2 30 to 1000 5 17 36 22 53 95 46 14 39 56 182 23 132 169 1/4 144 40 90 59 43 18.5 130 74 120 M16 x 1.5 M36 x 1.5 3/4 35 to 1200 5 30

Sine Rodless Cylinder Series REA/REB

62 12.5 22.5 0.5 1 72 97 30 75 M5 x 0.8 REAS20 40 70 90 90 38 73 16.5 25.5 87 115 Rc 1/8 NPT 1/8 G 1/8 CX REAS25 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 Rc 1/8 NPT 1/8 G 1/8 REAS32 75 110 50 91 18.5 28.5 0.5 1 119 138 40 122 Rc 1/8 NPT 1/8 G 1/8 MQ REAS40 105 120 64 99 20.5 35.5 1 1 142 155 65 145 Rc 1/4 NPT 1/4 G 1/4 PA dimensions are for split from center.