5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

10 C10 Option 10 10 stations M Mixed D side For bottom ported: Rc 1/4, 3/8 only.

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

C85

x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

C85

6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

Air Cylinder Series CA2

6 4 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 12.5 11.5 8.5 7.5 6 5 5.5 4 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 9 7 6 4 6.5 4.5 4.5 12.5 8 6 10 8 17.5 15.5 16.5 13.5 12.5 17.5 11 10 10.5 9 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 D-A9 and D-A9V types cannot be mounted on 50.

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

CJ2

Bore TH TT TU TC M3 X 0.5 6 6 8 11 CJ-CF006 8 CJ-CR006 5 6 +0.048 0 +0.048 0 CJ-T010B 10 M4 X 0.7 10 8 10 13 CJ-CF010 10 CJ-CR010 6 8 8 12 32 22 18 40 29 2 9 4.5 3.3 3.1 CJ-T016B 16 M5 X 0.8 16 10 12 15 CJ-CF016 12 CJ-CR016 7 10 10 16 38 28 20 48 35 14 2.3 5.5 5 6.4 Accessory: SCJ2 Bore size #11 1.3-12 Standard: Double Acting Double Rod Series CJ2W 6, 10, 16 How to Order CJ1 Bore size 6mm

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

AC Servo Motor Driver (CC-Link Type ）

4 2 8 6 10 LG 8 4 MRR LG MRR or 1 5 9 (Note) Signal layout 1 3 7 9 5 3 7 P5 BAT P5 MR BAT 9 SHD 7 5 MR 3 P5 1 MR 8 6 LG 4 MRR 2 BAT LE-CSE-SB View seen from wiring side.

Free Mount Cylinder Series CU

8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 7 10 11 12 15.5 19.5 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Y Without auto switch With auto switch DBore

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Vacuum Pad

) Resin Attachment 6, 8 10, 13 16, 20 25, 32 Mark-free.

Vacuum Pad

) Resin Attachment 6, 8 10, 13 16, 20 25, 32 Mark-free.

Vacuum Pad

) Resin Attachment 6, 8 10, 13 16, 20 25, 32 Mark-free.

Vacuum Pad

) Resin Attachment 6, 8 10, 13 16, 20 25, 32 Mark-free.

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

AC Servo Motor Driver

(Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

x 7/8" 1" x 7/8" 3 x 2 4 x 3 4 x 3 3 x 2 6 x 4 6 x 4 8 x 6 6 x 4 10 x 8 10 x 8 6 x 4 8 x 6 10 x 8 12 x 10 12 x 10 19 x 16 19 x 16 25 x 22 1 2 4 x 3 1/4" x 5/32" 2 6 x 4 3/8" x 1/4" 3 1/4" x 5/32" 10 x 8 3 1/2" x 3/8" 4 8 x 6 4 12 x 10 3/8" x 1/4" 5 19 x 16 6 3/4" x 5/8" 25 x 22 5 B side 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1" x 7/8" C side A side 6 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x

VFR

10 stations For bottom ported: Rc 1/4, 3/8 only.