3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

CG1

4 !5 !

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Cylinder port size Options 2 4 U side With One-touch fitting for 4 With One-touch fitting for 6 With One-touch fitting for 8 Mixed and with port plug Elbow top ported With One-touch fitting for 4 Elbow top ported With One-touch fitting for 6 Elbow top ported With One-touch fitting for 8 Elbow bottom ported With One-touch fitting for 4 Elbow bottom ported With One-touch fitting for 6 Elbow

Auto Switch Guide

Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

ZX

From the state described in step w, turn back the adjusting needle clockwise 1/4 turn to 1 full turn.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

REC

4 4.5 5 D-H7/H7W/ D-H7NF/H7BAL HS HS HS HS HS 20 2024.5 27 62 72 27.5 7 8.5 9 10 D-H7C 25 27 29.5 64.5 74.5 30 8 9 9 9 D-A3/D-A44 9 10 9 10 Data 4 4 4.5 5 D-G39/D-K39 D-G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.

•

ASP with PHot Check Valve enes How to Order ASP S;:30F 0,1 ,0615 t .. , I .""~" Pilot ch".J Body size e diameter size '3: 1/8 standard Applicable tube outsid Millimeter size Inch 06 07 01/4" I 06 '~ 1/4 standard 5 3/8 standard 6 1/2 standard 08 08 05/16" .09 I 10 010 ~1 1 * 03/8' L12 " 012 1211/2" ;~ Type I 3 I Untversal Port size . +' ) PH otport 4' ; ~Y!l1bOl Cylir!

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

FHG

T dimension) None Differential pressure indicator Differential pressure indication switch Note) 0 1 5 1 2 3 4 5 1 2 3 4 1 2 3 4 340 410 480 550 620 430 530 630 730 560 650 750 850 04 (1/2B) 06 (3/4B) 08 (1B) 30 FH FH Note) N.C. and N.O. common Note) When the differential pressure indication 1 or 5 is selected, the connection method is 2 to 5. (0 and 1 cannot be selected.)

CE2

4 !5 !6 !7 !8 !

CE2

4 !5 !6 !7 !8 !

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36 4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 4 ~ Dimensionwameans from port center to eccentric direction of gauge center. Modular Type Filter I Regulator with Built-in Pressure Gaug.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.