CLS

+ 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 47 47 53 60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63

KJ

(inch) H (Width across flats) Mounting plate thickness 11 mm or less Connection thread Min. port size Connection thread UNF L Mounting hole Weight (g) M Model 2-Applicable tubing KQ2E01-00 KQ2E03-00 KQ2E05-00 KQ2E07-00 KQ2E09-00 KQ2E11-00 KQ2E13-00 1 8 1 2 17.46 32.5 32.5 34 34.5 38 42.5 44.5 13.5 13.5 15 15 20 23 26 26 26 33 33 52 70 97 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 -20

3 Way,3 Port Solenoid Valve NVZ Series

/NVr'i|Zt-01-(OM) crommevNw4zl -20-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

NVZseies

/NVr'i|Zt-01-(OM) crommevNw4zl -20-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

Compressed Air Preparation Filter

1500 1000 500 2000 2500 1500 1000 500 3000 3500 Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] Specific Product Precautions 20 AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.

HRX-OM-R016

0.2 20 0.1 10 Availavel area 0.0 0 0 5 10 15 20 25 Circulating fluid flow[L/min] Fig. 9-9 Pump capacity(HRS030--20-MT) 9.7 Required facility water flow (for water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type 31 Type S31( ) Single solenoid coil is located on same side as the A, B port.

HRX-OM-X037

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

, R port) L plug connector (L): SYJ3 20-L-M3 (-F) M8 connector (W0): SYJ3 20-W0-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 50.1 [52.3] 40.3 [42.5] 49.2 41.8 53.1 46.6 35.3 13.5 13.5 13.5 111.5 [115.9] 91.9 [96.3] 109.7 15 15 22.1 15 22.1 22.1 Refer to the page 91 for

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Auto Switch Guide

M5 x 0.8 x 16 l 1.

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (W0): SYJ7140-W001 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 104.2 Max. .10 57.5 [64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) Approx. 300 68.6 [75.6] 20 20 20 20 Pg7 95.1 [97.3]

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(PE port) 14 M3 x 0.5 (P, R port) L plug connector (L): SYJ3 20-L-M3 (-F) M8 connector (WO): SYJ3 20-WO-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 50.1 [52.3] 40.3 [42.5] 49.2 41.8 53.1 46.6 35.3 13.5 13.5 13.5 111.5 [115.9] 91.9 [96.3] 109.7 15 15 22.1 15 22.1 22.1

Aluminum High Vacuum Angle Valve

M10, L = 20 Refer to part no.

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

Rotary Table/

Rotary Table/Rack-and-Pinion Type Series MSQ With External Shock Absorber Size: 10, 20, 30, 50 How to Order MSQ B 10 L S F9B 2 Number of auto switch 2 pcs. 1 pc. n pcs.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Support Guide/11-LEFG Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

Auto Switch Guide

M5 x 0.8 x 16 l 1.