Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Platform Cylinder Series CXT

CXT Long Stroke (mm) X Y Z Stroke range (mm) Bore size (mm) CXSJ 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 40 125, 150, 175, 200, 250, 300 55 14 14 CXS D-X Individual -X 529 Series CXT Minimum Stroke for Mounting of Auto Switch (mm) Application Auto switch model No. of auto switches mounted D-A9V D-A9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-M9 CXT12 1 10 10 5 15 20 5 to CXT25 2 10 10 10

LJ1H

Single Axis Electric Actuator Series LJ1H High Rigidity Direct Acting Guide Lead screw lead mm Mounting Series Motor type Guide type Page Model orientation Ground ball screw Rolled ball screw 12 10 20 12 10 20 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 Page 2 to Horizontal Page 6 to High rigidity direct acting guide 25 25 Page 14 to Standard LJ1H motor 8 12 8 12 Page 18 to 5 10 5 10 Vertical

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

IMPACT BLOW GUN

.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D. Part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

1 Blow Gun Series VMG K
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MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Applicable model AR30 AR40 AR40-06 AR50 AR60 Option Note 4) Note 4) Note 1) AR30P-270AS AR40P-270AS AR40P-270AS AR50P-270AS AR50P-270AS Bracket assembly Note 5) Note 5) AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Round Square embedded type Round Square embedded type 1MPa Note 2) Note 3) Pressure gauge GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa

NCA1

3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/

Air Slide Table Series MXP

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N

Air Slide Table/Long Stroke Type Series MXY

Nil 6 50, 100, 150, 200 1 pc.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

157 149 79 32 64 10 7 50 up to 500 171 158 90 36 72 10 9 55 up to 600 188 176 110 45 90 12 9 70 FY B up to 600 188 176 120 50 100 12 9 80 up to 750 238 220 153 63 126 16 12 100 FT FX up to 750 238 220 178 75 150 16 14 120 ZZ + Stroke FZ Single clevis(C)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) -0.1 -0.3 CDH10 U ZZ RR Z Z L CX ZZ CDH10 32 40 50

Digital Flow Switches

Remote Type Water resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application

Digital Flow Switches, Series PF2A, Series PF2W

Remote Type Water resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application

A

NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/