VZ100/300/500

VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

Thermo-con/Rack Mount Type

500 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Pump Capacity (Thermo-con Outlet) HECR002-A When high-pressure pump mounted 0.14 0.10 0.12 Discharge pressure [MPa] Discharge pressure [MPa] Tap water 0.08 Tap water 0.10 0.06 0.08 Ethylene glycol 20% Ethylene glycol 20% 0.06 0.04 0.04 0.02 0.02 0 0 1 2 3 4 0 0 1 2 3 4

Rotary Table/

30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 5 10 15 20 25 30 CRA1 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement

q"s

mA. 0 to 20 mA (Sink tvoe) Voltage type 0 to 5 VDC. 0 to l0 VDC Presel inDut 4 ooints Current type 250 o or less Voltage type AoDrox. 6.5 kQ Presel inpul ADotox.2.7 ket Straight type Right angle type Inpul impedance H Analog output 1 lo 5 VDC (Load impedance: 1 kQ or more) 4 to 20 mA (Sink type) {Load impedance: 250 o or less) Output signal (rnonitor output) JIS Symbol Switch output NPN

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

, 500 750 15 Helical insert thread 1000 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Non-lubricated exterior (without dust seal) 25 1500 Outside of cylinder tube with hard chrome plated 32 Non-lubricated exterior (with dust seal) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 1500 40 Switch rails on both sides (with 2 pcs.)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

37 17 40 21 40 11 23 0 26 With rod boot Bore (mm) e Stroke range (mm) f h ZZ l 40 50 63 80 100 1/4 stroke 20 to 500 43 11.2 59 154 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 20 to 600 52 11.2 66 178 1/4 stroke 20 to 750 65 12.5 80 213 1/4 stroke 20 to 750 65 14 81 224 3.8-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore size Stroke

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

stroke (mm) 400 450 450 500 Bore size (mm) 20 25 32 40 Standard stroke (mm) Available maximum stroke (mm) MXW MXP 25, 50, 75, 100, 125, 150, 200, 250 300 1000 MG The long-stroke style is only applicable to the axial foot style and the front flange style.

CV/MVGQ

247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 40 50 63 80 100 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

240

7 to 10 25 to 50 12.5 to 25 Compact 24 to 40 12 to 20 Horizontal Basic 2.0 1.0 6.0 3.0 Compact 4.0 2.0 Work load [kg] Note 2) Note 3) Note 6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Actuator specifications Horizontal Basic 10 to 150 20 to 300 Note 4) 10 to 200 20 to 350 Note 4) Compact 10 to 200 20 to 350 Note 4) Speed [mm/s] Note 3) Note 6) Vertical Basic 10 to 150 20 to

VZ3000

fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 C4: T0425 C6: T0604 3-3-23 Series VZ3000/Body Ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold

HRX-OM-X037

35oC 20 15 10 5 0 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [oC] Fig. 9-18 Cooling Capacity (HRL200-W-40 CH1) HRL Series 9.4 Cooling Capacity 9-17 HRX-OM-X037 Chapter 9 Documents 9.4.13 HRL100/200-W-40 CH2 3.0 2.5 Cooling capacity [kW] Ambienttemperature 45oC or less 2.0 (Max. 1.5 kW) 1.5 Rated 1.0 kW 1.0 0.5 0.0 10 15 20 25 30 35 40 Circulating fluid temperature [oC] Up to

Compact and Lightweight

20 20 20 40 40 ZA 0 0 0 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] 0 0 20 40 60 80 Supply pressure [MPa] 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 250 100 250 100 100 100 Vacuum pressure

Slide Unit Series CX2/CXWM/CXWL

For the strokes indicated in the parentheses of the 20 and 32, a shock absorber is to be mounted on single side of the plate. Note2) For the strokes other than those indicated above, refer to page 474. Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order.

Slide Unit Series CX2/CXWM/CXWL

For the strokes indicated in the parentheses of the 20 and 32, a shock absorber is to be mounted on single side of the plate. Note2) For the strokes other than those indicated above, refer to page 474. Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order.

CV/MVGQ

For detailed specifications, refer to page 10-20-1.

CXWM/CXWL

For the strokes indicated in the parentheses of the 20 and 32, a shock absorber is to be mounted on single side of the plate. Note2) For the strokes other than those indicated above, refer to page 8-26-9. Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order.

Manifold Specifications

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

Compressed Air Preparation Filter

AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.