Rotary Actuator/Vane Type

unit 30 47 90 150 203 30 47 90 150 203 Effective Output Direct Mounting of Body Size 10 Size 15 Screw 0.4 1.0 Effective torque [Nm] Effective torque [Nm] Double vane Double vane 0.8 0.3 0.6 0.2 Single vane Single vane 0.4 0.1 0.2 0 0 0 0 Dimension L of the actuators is provided in the table below for JIS standard hexagon socket head cap screws.

Environment

200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

High Power Cylinder Series RHC

) AS420 (102) AS421F (26) AS431F (24) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS600 (258) AS500 (123) AS4200 (26) AS420 (102) AS500 (123) AS600 (258) AS600 (258) AS600 (258) AS600 (258) AS420 (102) AS600 (258) AS600 (258) AS600 (258) AS800 (586) AS500 (123) 1-A

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

HRX-OM-Z002

5.9.6 Accumulated operating time of the DI filter . 5-26 5.9.7 Reset of the accumulated operating time of the DI filter . 5-26 5.10 ANTI-FREEZING FUNCTION . 5-27 Chapter 6 Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

Refrigerated Air Dryers

158 Cable hole 150 130 Terminal block Specifications 175 7.5 110 15 4 x 7 Part no.

CKZ2N

ACA100M ACA101M ACA102M ACA103M ACA104M ACA105M ACA106M ACA107M ACA108M CKZ-80A001 CKZ-80A002 CKZ-80A003 CKZ-80A004 CKZ-80A005 CKZ-80A006 CKZ-80A007 CKZ-80A008 CKZ-80A009 2.3 (5.07) 2.7 (5.96) 3.0 (6.62) 3.4 (7.50) 3.8 (8.38) 4.2 (9.27) 4.5 (9.93) 4.9 (10.81) 5.3 (11.69) 20 mm Offset-Plain 32 0.03 A M10 x 1.5 R40 62 0.05 42 R37 10.5 30 16 30 26 R9 Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36 38 45 56 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38

PFxx-OMX0002

L/min (PF3A706H) [6000] 6000 L/min (PF3A712H) [F 2] 2 [ 150] 150 L/min (PF3A703H) [H_2 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) [ 600] 600 L/min (PF3A712H) [dt2 ] Delay time setting [0.00] 0.00 s [CoL ] Select display colour [1SoG] Green when ON Red when OFF (OUT1) [F 3] [FiL ] Select digital filter [ 1.0] 1 second Page 44 [F 5] [FUnC] Select FUNC (switching analogue output/external

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

MHL2

Width across flats 17 A 30 68 (4 locations) (100) 26 40 32 32 32 50 15 Closed E 15 15 70 Open F 24 24 4-M10 X 1.5 through (Thread for mounting attachment) B C D E F G H 110 158 202 J 202 282 366 Model MHL2-32D MHL2-32D1 MHL2-32D2 56 104 148 272 370 454 86 134 178 220 318 402 150 198 242 60 108 152 Note 1) J dimension is at fully closed.

HRX-OM-W002

Dust filter replacement time 26. Press the [] key. Displays dust filter replacement time setting screen.

MVGQ

70 38 86 2 62 76 M6 x 1.0 56 10 125, 150, 175, 200 Series VZ3000 25, 50, 75, 100, 32 M8 x 1.25 20 11 47.5 37.5 16 114 25 26 38 16 35 51 M8 x 1.25 22 30 96 48 112 2 1 80 100 M8 x 1.25 80 5 125, 150, 175, 200 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

HRX-OM-X084

Dust filter replacement time 26. Press the [] key. Displays dust filter replacement time setting screen.

VM

-9200-www.stevenengineering.com 5.4 mm P.T. 26 N F.O.F. 4-4.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

Series IDG

600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150

CG5-S

130 7 M22 x 1.5 80 130 28 17 212 3/8 100 to 1500 40 37 41 125 60 30 29 20 71 16 110 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 131 30 15 216 1/2 Foot brackets and plug bolts are installed before shipment from factory.