Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

Programless Controller Series LECP1

m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be

energy saving effect

Low Low Low Low High High Motor rotation rate Motor rotation rate Variations Cooling capacities ranging from 10 kW to 25 kW Air-cooled refrigeration Water-cooled refrigeration Model HRSH250-A HRSH300-A Model HRSH100-A HRSH150-A HRSH200-A Model HRSH100-W HRSH150-W HRSH200-W HRSH250-W Cooling capacity 10.5 kW 15.7 kW 20.5 kW Cooling capacity 25 kW 28 kW Cooling capacity 11.5 kW 15.7 kW 20.6

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Dual Rod Cylinder Series CXSJ/CXS

0 y i t o w !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Plug-in/Plug Lead: Single Unit

(0.1 to 0.7 MPa) Note) Port size External pilot pressure range 0.15 to 1.0 MPa (0.15 to 0.7 MPa) Double Thread type Nil N T F Rc NPT NPTF G 0.15 to 1.0 MPa (0.15 to 0.7 MPa) 0.2 to 1.0 MPa (0.2 to 0.7 MPa) 3 position Note ) Values inside ( ) denote the low wattage (0.5 W) specifications. 2-6-39 Series VQ5000 Construction Plug-in Unit Metal seal Rubber seal type e e q w q w VQ5100 VQ5101 (

NCQ8

Nil S n 2 pcs. 1 pc. n pcs.

Air Slide Table

Front matter 1 Air Slide Table/Reversible Type Series MXQR Fig. (1) Load Weight: W (kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (3) Workpiece Mounting Coefficient: K Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L1 A1 K = 1 L3 A5 L2 A3 End plate mounting Mp Mr W My W W W L3 A6 W L1 A2

T

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5

90

L1 Note 14) Note 16) L-type plug connector L2 Note 13) Note 17) L3 Note 14) Note 17) With lead wire for switch with energy saving function W Non-valve (without supply/ release valve) When N is selected for e Y Note 16) Y1 Single Unit and Options Note 26) When N is selected for both e (Combination of Supply Valve and Release Valve) i u y t r e w q N and t (Pressure Sensor/Pressure

Vacuum System Peripherals:

r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Stopper Cylinder

0 w q e r t u !

Guide Cylinder/Compact Type Series MGC

) MGZ MGT Allowable end load F (N) MGCL 50-R Stroke (Ball busing bearing type) Deflection Y (mm) St: Stroke (mm) D-X Allowable end load F (N) Individual -X 399 Series MGC Allowable Eccentric Load MGCM Slide bearing/ -R MGCL Ball bushing bearing/ -R Stroke Stroke l l Allowable eccentric load W (N) Allowable eccentric load W (N) Eccentric distance from center of cylinder to load center of gravity

CV/MVGQ

(n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 10 20 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 25 + 35 (n 2) n = 2, 3, 4 90 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 110 + 35 (n 2) n = 2, 4, 6, 8 Different sides D-A44C n 55 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n =