Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Current Output, Auto-Shift, Option 1: Fixed SI Unit, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Current Output, Auto-Shift, Option 1: W/Unit Display Switching Function, Option 2: Panel Mount Rear or Bottom Ported, Option 3: -, X Options: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None,

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

A

I O N S S I D E S U P P O R T U N I T C O U N T E R B O R E D (S I D E S U P P O R T A) D I M E N S I O N S S T R O K E A D J U S T I N G U N I T Stroke adjustment unit Absorber stroke Shock Absorber D I M E N S I O N S S I D E S U P P O R T U N I T TA P P E D (S I D E S U P P O R T B) Cushion screw Model h EA EB EC ED EY FA FB FC FF FH TA TT ML2B25 3.5 10 20 6.5 60 53.5 46.7 33 13 6 12 7

2

INDEX 166 Series AF10-A to AF60-A Dimensions AF10-A/AF20-A AF50-A/AF60-A D U M J N T Bracket (Option) S Bracket (Option) R R B C V Q OUT IN J M U S N T 2 x P (Port size) D R V Q B C IN OUT Clearance for maintenance G Drain A AF30-A to AF40-06-A N T J M 2 x P (Port size) Bracket (Option) U D S V Q IN OUT B C 2 x P (Port size) Clearance for maintenance G Drain A E Clearance for maintenance

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY340 SY540 SY340 SY540 SY340 SY540 SY740 + + + + P. 198 EA P EB Type 41P P. 214 EA P EB In common Type 42 P. 198 + + + + + + + + EA P EB EA P EB SY340 SY540 SY740 Type 42P P. 214 EB P EA In common Type 43 SY940 + + + + P. 208 Base mounted Stacking type Flat ribbon cable Manifold stations can be increased or decreased.

Table of Contents

) MY1C63 Horizontal collision: P = 0.5 MPa Shock absorber 2000 1500 H unit Collision speed (mm/s) 2.

&snac

i O N : S , P S ) f i t t i n s i n g u s e p u r s i n s o f t u b e a T u b e s i z e w i t h o n e t o u c h ( o p t i o n P , P 5 ) f o r p u r g p l e a s e r e f e r t o P . ?

0.4

[Fieldbus system]) EX600 P. 17 VQC1000/2000 S kit (Serial transmission) EX250 P. 21 VQC1000/2000 S kit (Serial transmission) EX126 P. 23 VQC1000/2000 F kit (D-sub connector) P. 25 VQC1000/2000 P kit (Flat ribbon cable) P. 27 VQC1000/2000 T kit (Terminal block box) P. 29 VQC1000/2000 L kit (Lead wire) P. 31 VQC1000/2000 M kit (Circular connector) P. 33 VQC1000/2000 Construction VQC1000/2000

5-Port Solenoid Valve

41 p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53

Table of Contents

(N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

ZP

p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101

0.4

(-S) Special wiring specifications (-K) C6 L6 P.97 P.98 P.105 P.96 D-sub connector Terminal no.

SY

Co., Ltd. 108 Type45A NA Manifold Options How to order interface regulators (SY3000/5000 only) Series SY5000 ARBY3000 05 Series SY3000 P 2 ARBY5000 00 P 2 Regulated port Regulated port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P port A port (P port control type A port regulated) B port (P port control type B port regulated)