SMC Pneumatic Clean Series

8 0 -0.3 LX X T A Y NA NB LZ S + Stroke H Head cover side Rod cover side Z + Stroke 10 and 16 Cover surface MM NN GA GB F GC Piping port 3-M5 x 0.8 Piping port M5 x 0.8 CA CB D LY LB LH LT BA 0 -0.3 BB 0 -0.3 LX Head cover port location Axial direction (R) X A Y NA NB 2-LC Mounting hole LZ S + Stroke H Head cover side Rod cover side Z + Stroke (mm) 5 5 12 GA GB 11 11 11 H Bore size Z LZ

Hygienic Design Cylinder Series HY

12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 11 10 14 12 17 17 12 13 14 14 20 20 CJ5 CG5 HY P Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc

180° Angular Style Air Gripper Series MHY2/MHW2

Replacement part/grease pack part no. : 20, 25 : GR-S-005(5g) 32 : GR-S-010(10g) 40, 50 : GR-S-020(20g) 671 Series MHW2 Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9

Compact 5-Port Solenoid Valve

Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

CJ2X/CUX/CQSX/CQ2X/CM2X

x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure M5 x 0.8 Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. 0.03 MPa 0.025 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed

Rotary Table/Vane Style Series MSU

MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane

Compact

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

Vacuum Pad: Ball Joint Type

13 40 2 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 32 35 13 16 29.8 47 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon

Electric Grippers

LEHZ/LEHZJ: 5 to 50 mm/s LEHF10: 5 to 20 mm/s LEHF20/32/40: 5 to 30 mm/s LEHS: 5 to 50 mm/s Operation at the speed outside of the range can get the lead screw caught and cause operation failure. 9. Self-lock mechanism The product keeps a gripping force due to the self-lock mechanism in the lead screw.

Fieldbus System

D-sub Note 1) M12 CC-Link Note 1) D-sub S kit: IP40 specification (IP67 specification for all other S kits) Note 2) For SI unit part number, refer to page 1.

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) Brake Without brake With brake Nil B Home position switch None Yes (cable length 0.3m) Nil S Specifications 2 phase stepper motor (with/without brake) 5 phase stepper motor (with/without brake) Motor Lead screw Positioning repeatability Lead Speed Note1) Slide screw 8mm 0.05mm 6mm 3 to 100mm/s 9 (4)kg 4 (4)kg 12mm 6 to 200mm/s 4.5 (4)kg 2 (2)kg 12mm 6 to 200mm/s 3 (3)kg 1 (1)kg

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Air Slide Table Series MXS

x 18 M6 x 20 M8 x 25 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 4.4 7.0 M2.5 x 10 M3 x 12 M4 x 15 M5 x 18 M6 x 20 M8 x 25 M2.5 x 8 M3 x 10 M4 x 8 M5 x 10 M5 x 12 M6 x 16 Shock Absorber Caution 1.

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

ITV

, Hyteresis Repeatability With 50% of signal input 1 0.8 1 Output deviation factor (% F .S.)

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

46.5 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by tube diameter (mm) ZPR32F-0-B5 M5 x 0.8 Q: 4 Q: 6 13 16 29.8 47 32 35 Pad diameter (mm) ZPR32F-0-B8 M8 x 1.25 R 20.6 R S 12.8 S Dimensions by tube diameter 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 20 to 32 12.8 26.2 ZPR 40/50 F-0-B8 (Without Buffer/Female Thread) S Width across

CJ2X/CUX/CQSX/CQ2X/CM2X

x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure M5 x 0.8 Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. 0.03 MPa 0.025 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed

CJ2X/CUX/CQSX/CQ2X/CM2X

x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure M5 x 0.8 Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. 0.03 MPa 0.025 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed