VQ20/30

VDW Option Enter together in order, counting from station 1 on the D side. 20 20 stations None DIN rail mounting DIN rail mounting (Without DIN rail) Nil D DO VQ VX2 U side D side Stations321 VX VX3 VXA A port VN P1 LVC How to Order Valves (For Manifold) LVA VQ M C6 2 1 1 1 G LVH Series/ Orifice size LVD Port size Symbol 2 3 Series VQ20 VQ30 LVQ VQ20 VQ30 Symbol C6 C8 C10 C12 Port size

Vacuum Manifold for fieldbus system

D side U side -22No. ZKJ-OM00201-D 7.5.

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Compact Cylinder

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

NCQ2/CQ2

40 45 50 55 60 65 70 75 80 85 120 145 D D 35 40 45 50 55 60 65 70 75 80 115 C D 35 40 45 50 55 60 65 70 75 80 C Bolt part no.

Electric Actuators

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Air Cylinder

120 32 29.5 45.5 70.5 95.5 120.5 40 34.5 47.5 72.5 97.5 122.5 D-C7l D-C80 D-C73C D-C80C CM2 20 29.5 45.5 70.5 95.5 25 29 46 71 96 121 32 30.5 46.5 71.5 96.5 121.5 40 35.5 48.5 73.5 98.5 123.5 CM3 CG1 CG1 20 25 41 66 91 25 24.5 41.5 66.5 91.5 116.5 32 26 42 67 92 117 40 31 44 69 94 119 D-G5NT D-G59F CG3 JMB 20 23.5 39.5 64.5 89.5 25 23 40 65 90 115 32 24.5 40.5 65.5 90.5 115.5 40 29.5

Table of Contents

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Digital Flow Switch Series PFA For Air Series PFW For Water

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

CM2

33.5 200 to 250 132 138 135 131.5 137 133.5 25.5 28 31.5 35.5 22.5 25 28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 1.5 1.5 2.5 7.5 D-B5/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A

Compact Vacuum Unit Ejector/ Vacuum Pump System

See page 37 40 - Doc. no.

10

D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 CJ1 D-A9l D-A9lV D-P3DWA D-P4DW CJP CJ2 Bore size A B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50

CQ2

M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l 5.5 6.1 Spring return 8 8 10.5 10.5 9.5 9.5 9 9 Spring extend 7.5 7.5 12.5 12.5 Auto Switch Mounting Position (at Stroke End) and Mounting Height D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W

MB

2 (n4) 2 105 + 55 n = 4, 8, 12, 16 100 + 55 140 + 55 n (Same side) D-F5NTL n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 140 105 120 125 130 2 (Different sides or Same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7 W 95 100 105 80 85 90 (n4) 2 (n4) 2 (n4) 2 (n4) 2 100 + 40 (n4) 2 (n4) 2 85 + 40 90 + 40 n = 4, 8, 12, 16 80 + 40 105 + 40 95 + 40 n n = 4, 8

CM2

20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C

Electric Actuator

(2.5 to 40 mA). # The optimum operating range can be D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry determined by the color of the light.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BAL D-F79F D-F7NTL D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-M9V D-F9WV D-A9V Bore size (mm) D-J79C D-A79W D-P5DWL D-F9BAL U 27 30.5 36.5 40 U 29 32.5 38.5 42 U 26.5 30 36 39.5 U 44 50 56.5 U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 U 20.5

Compressed Air Preparation Filter

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

3 Port Air Operated Valve Series SYJA300 1

3(R) 1(P) NC 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 5-5-20 9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G NPT NPTF VP Air operated manifold F VA N T SA Body size A port size VV3PA7-41-051-04 3 5 standard 1 4 Symbol Port size Rc 02 03 04 Applicable manifold base model VA 3 8 standard

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".